Physical Vapor Growth of Double Position Boundary Free, Quasi-Bulk 3C-SiC on High Quality 3C-SiC on Si CVD Templates
2016 ◽
Vol 858
◽
pp. 89-92
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Keyword(s):
We have developed and investigated the quasi-bulk crystal growth of 3C-SiC on transferred, high quality, CVD-grown templates using a sublimation sandwich related technique. The seeding layers were removed from the silicon carrier using a solution of hydrogen fluoride, nitric acid and water and glued to a substrate using carbon glue. The transferred layers were used as seeding material to grow high quality, single crystalline, DPBs free 3C-SiC crystals with thicknesses of up to 860 μm and a size of 18 x 20 mm. Analysis of the 3C-SiC layers was carried out using Laue measurement in back-reflecting geometry, Raman spectroscopy and optical microscopy.
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2020 ◽
Vol 547
◽
pp. 125802
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Keyword(s):
2013 ◽
Vol 740-742
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pp. 311-314
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2005 ◽
Vol 483-485
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pp. 43-46
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2014 ◽
Vol 778-780
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pp. 17-21
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1990 ◽
Vol 102
(4)
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pp. 696-700
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1988 ◽
Vol 46
◽
pp. 488-489
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