The Effect of Stepped Wall of the Graphite Crucible in Top Seeded Solution Growth of SiC Crystal
Keyword(s):
The crucible design having a stepped wall was introduced for increasing the growth rate of SiC crystal without metal addition in top-seeded solution growth (TSSG) method. The numerical simulation confirmed that new crucible design to increase the solvent-crucible interface could definitely change the temperature distribution and increase the carbon concentration. The simulation result, SiC single crystals were grown with Si solvent at 1900°C using a normal crucible and a stepped crucible to investigate the effect of crucible design having a stepped wall. Grown SiC layers were analyzed using Optical microscopy and Raman spectra. The growth rate in the stepped crucible was finally 66um/h observed.
2014 ◽
Vol 778-780
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pp. 63-66
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Keyword(s):
2002 ◽
Vol 237-239
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pp. 778-782
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2013 ◽
Vol 740-742
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pp. 65-68
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Keyword(s):
2013 ◽
Vol 5
(9)
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pp. 1271-1274
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1996 ◽
Vol 167
(3-4)
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pp. 638-643
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