TLS-Dicing for SiC - Latest Assessment Results

2018 ◽  
Vol 924 ◽  
pp. 547-551
Author(s):  
Dirk Lewke ◽  
Mercedes Cerezuela Barreto ◽  
Karl Otto Dohnke ◽  
Hans Ulrich Zühlke ◽  
Christian Belgardt ◽  
...  
Keyword(s):  
State Of The Art ◽  
Semiconductor Devices ◽  
The State ◽  
Electrical Performance ◽  
European Project ◽  
Edge Quality ◽  
Volume Production ◽  
Laser Separation ◽  
Assessment Results

With the gaining demand for SiC semiconductor devices it is more and more challenging to meet the requirements for SiC volume production with the state of the art wafer dicing technology. In order to overcome this challenge the laser based dicing technology Thermal Laser Separation (TLS-DicingTM) was assessed for SiC volume production within the European project SEA4KET. This paper presents the key results of this project. It could be demonstrated that the demand of SiC volume production regarding throughput and cost as well as edge quality and electrical performance of diced chips can be met with TLS-DicingTM.

Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation

2012 ◽  
Vol 1433 ◽  
Author(s):  
Dirk Lewke ◽  
Matthias Koitzsch ◽  
Martin Schellenberger ◽  
Lothar Pfitzner ◽  
Heiner Ryssel ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
State Of The Art ◽  
Separation Process ◽  
Back Side ◽  
Current State ◽  
Edge Quality ◽  
First Time ◽  
Metal Layers ◽  
Laser Separation ◽  
Street Width

ABSTRACTThis paper presents Thermal Laser Separation (TLS) as a novel dicing technology for silicon carbide (SiC) wafers. Results of this work will play an important role in improving the SiC dicing process regarding throughput and edge quality. TLS process parameters were developed for separating 4H-SiC wafers. Separated SiC dies were analyzed and compared with results produced with current state of the art blade dicing technology. For the first time, fully processed 100 mm 4H-SiC wafers with a thickness of 450 μm, including epi-layer and back side metal layers, could be separated with feed rates up to 200 mm/s. Besides the vastly improved dicing speed, the TLS separation process results in two important features of the separated SiC devices: First, edges are free of chipping and therefore of higher quality than the edges produced by blade dicing. Second, the TLS process is kerf free, which allows for reducing the necessary dicing street width and hence increasing the number of devices per wafer.

scholarly journals All-fiber tribo-ferroelectric synergistic electronics with high thermal-moisture stability and comfortability

2019 ◽  
Vol 10 (1) ◽  
Author(s):  
Weifeng Yang ◽  
Wei Gong ◽  
Chengyi Hou ◽  
Yun Su ◽  
Yinben Guo ◽  
...  
Keyword(s):  
Peak Power ◽  
State Of The Art ◽  
Real Life ◽  
Low Frequency ◽  
The State ◽  
Electrical Performance ◽  
Life Situation ◽  
Hierarchical Networks ◽  
Real Life Situation ◽  
Low Frequency Motion

AbstractDeveloping fabric-based electronics with good wearability is undoubtedly an urgent demand for wearable technologies. Although the state-of-the-art fabric-based wearable devices have shown unique advantages in the field of e-textiles, further efforts should be made before achieving “electronic clothing” due to the hard challenge of optimally unifying both promising electrical performance and comfortability in single device. Here, we report an all-fiber tribo-ferroelectric synergistic e-textile with outstanding thermal-moisture comfortability. Owing to a tribo-ferroelectric synergistic effect introduced by ferroelectric polymer nanofibers, the maximum peak power density of the e-textile reaches 5.2 W m−2 under low frequency motion, which is 7 times that of the state-of-the-art breathable triboelectric textiles. Electronic nanofiber materials form hierarchical networks in the e-textile hence lead to moisture wicking, which contributes to outstanding thermal-moisture comfortability of the e-textile. The all-fiber electronics is reliable in complicated real-life situation. Therefore, it is an idea prototypical example for electronic clothing.

scholarly journals Advances in Elemental Electron Tomography for the State-of-the-art Semiconductor Devices and Circuits Characterization and Failure Analysis

2017 ◽  
Vol 23 (S1) ◽  
pp. 1456-1457 ◽  
Author(s):  
B. Fu ◽  
M Gribelyuk ◽  
Frieder H. Baumann ◽  
C. Fang ◽  
Wayne Zhao ◽  
...  
Keyword(s):  
Failure Analysis ◽  
State Of The Art ◽  
Electron Tomography ◽  
Semiconductor Devices ◽  
The State

СОВРЕМЕННОЕ СОСТОЯНИЕ И ПЕРСПЕКТИВЫ РАЗВИТИЯ СИЛОВОГО ПОЛУПРОВОДНИКОВОГО ПРИБОРОСТРОЕНИЯ В РОССИИ ДЛЯ МОЩНОЙ ПРЕОБРАЗОВАТЕЛЬНОЙ И ИМПУЛЬСНОЙ ТЕХНИКИ

2020 ◽  
Vol 96 (3s) ◽  
pp. 164-168
Author(s):  
Е.М. Гейфман ◽  
И.В. Грехов ◽  
Г.Ю. Каменцев ◽  
А.Ю. Петров ◽  
В.В. Чибиркин
Keyword(s):  
Growth Rate ◽  
Electric Power ◽  
State Of The Art ◽  
Semiconductor Devices ◽  
Economic Security ◽  
The State ◽  
Power Semiconductor ◽  
Power Semiconductor Devices ◽  
Russian Economy

Силовые полупроводниковые приборы (СПП) являются основной электронной компонентной базой для мощной силовой электроники и импульсной техники, для важнейших областей экономики России. Состояние производства СПП оказывает существенное влияние на темпы роста экономики России и ее экономическую безопасность. Power semiconductor devices (PSD) are basic components for the electric power converting electronics and pulsed technology, for the most important branches of the Russian economy. The state-of-the-art in the development and production of PSD has a significant impact on the growth rate of the economy of Russia and its economic security.

scholarly journals Evidence-Aware Hierarchical Interactive Attention Networks for Explainable Claim Verification

2020 ◽  
Author(s):  
Lianwei Wu ◽  
Yuan Rao ◽  
Xiong Yang ◽  
Wanzhen Wang ◽  
Ambreen Nazir
Keyword(s):  
Source Credibility ◽  
State Of The Art ◽  
The State ◽  
Attention Networks ◽  
Interaction Layer ◽  
Internal Interaction ◽  
Art Performance ◽  
Global Inference ◽  
Assessment Results

Exploring evidence from relevant articles to confirm the veracity of claims is a trend towards explainable claim verification. However, most strategies capture the top-k check-worthy articles or salient words as evidence, but this evidence is difficult to focus on the questionable parts of unverified claims. Besides, they utilize relevant articles indiscriminately, ignoring the source credibility of these articles, which may cause quiet a few unreliable articles to interfere with the assessment results. In this paper, we propose Evidence-aware Hierarchical Interactive Attention Networks (EHIAN) by considering the capture of evidence fragments and the fusion of source credibility to explore more credible evidence semantics discussing the questionable parts of claims for explainable claim verification. EHIAN first designs internal interaction layer (IIL) to strengthen deep interaction and matching between claims and relevant articles for obtaining key evidence fragments, and then proposes global inference layer (GIL) that fuses source features of articles and interacts globally with the average semantics of all articles and finally earns the more credible evidence semantics discussing the questionable parts of claims. Experiments on two datasets demonstrate that EHIAN not only achieves the state-of-the-art performance but also secures effective evidence to explain the results.

scholarly journals Intelligent Multimodal Framework for Human Assistive Robotics Based on Computer Vision Algorithms

Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2408 ◽  
Author(s):  
Eugenio Ivorra ◽  
Mario Ortega ◽  
José Catalán ◽  
Santiago Ezquerro ◽  
Luis Lledó ◽  
...  
Keyword(s):  
Computer Vision ◽  
Pose Estimation ◽  
State Of The Art ◽  
The State ◽  
Assistive Technologies ◽  
Assistive Robotics ◽  
Multimodal Interface ◽  
Persons With Disabilities ◽  
Object Selection ◽  
European Project

Assistive technologies help all persons with disabilities to improve their accessibility in all aspects of their life. The AIDE European project contributes to the improvement of current assistive technologies by developing and testing a modular and adaptive multimodal interface customizable to the individual needs of people with disabilities. This paper describes the computer vision algorithms part of the multimodal interface developed inside the AIDE European project. The main contribution of this computer vision part is the integration with the robotic system and with the other sensory systems (electrooculography (EOG) and electroencephalography (EEG)). The technical achievements solved herein are the algorithm for the selection of objects using the gaze, and especially the state-of-the-art algorithm for the efficient detection and pose estimation of textureless objects. These algorithms were tested in real conditions, and were thoroughly evaluated both qualitatively and quantitatively. The experimental results of the object selection algorithm were excellent (object selection over 90%) in less than 12 s. The detection and pose estimation algorithms evaluated using the LINEMOD database were similar to the state-of-the-art method, and were the most computationally efficient.

Practical Picture Processing

1974 ◽  
Vol 32 ◽  
pp. 338-339
Author(s):  
T. A. Welton
Keyword(s):  
Radiation Damage ◽  
Coherence Length ◽  
Spatial Information ◽  
State Of The Art ◽  
Coherent Radiation ◽  
The State ◽  
Energy Spread ◽  
Electron Micrograph ◽  
Picture Processing ◽  
Molecular Skeleton

Various authors have emphasized the spatial information resident in an electron micrograph taken with adequately coherent radiation. In view of the completion of at least one such instrument, this opportunity is taken to summarize the state of the art of processing such micrographs. We use the usual symbols for the aberration coefficients, and supplement these with £ and 6 for the transverse coherence length and the fractional energy spread respectively. He also assume a weak, biologically interesting sample, with principal interest lying in the molecular skeleton remaining after obvious hydrogen loss and other radiation damage has occurred.

Hypothesis-Evidence Coordination: The State of the Art

2003 ◽  
Vol 48 (6) ◽  
pp. 826-829 ◽  
Author(s):  
Eric Amsel
Keyword(s):  
State Of The Art ◽  
The State

The State of the Art

1968 ◽  
Vol 13 (9) ◽  
pp. 479-480
Author(s):  
LEWIS PETRINOVICH
Keyword(s):  
State Of The Art ◽  
The State
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