Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride
1977 ◽
Vol 35
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pp. 114-115
1991 ◽
Vol 49
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pp. 930-931
2010 ◽
Vol 205
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pp. S1-S4
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Keyword(s):
2019 ◽
Vol 39
(4)
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pp. 743-754
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2012 ◽
Vol 46
(26)
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pp. 3321-3324
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1986 ◽
Vol 2
(3)
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pp. 243-244
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2010 ◽
Vol 105-106
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pp. 27-30
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2004 ◽
Vol 69
(1)
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pp. 59-67
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