Simulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm

2017 ◽  
Vol 30 (6) ◽  
Keyword(s):  
Pressure Sensor ◽  
Mechanical Systems ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Simulation And Modeling ◽  
Micro Electro Mechanical Systems

scholarly journals A micro-capacitive pressure sensor design and modelling

2016 ◽  
Vol 5 (1) ◽  
pp. 95-112 ◽  
Author(s):  
Ali E. Kubba ◽  
Ahmed Hasson ◽  
Ammar I. Kubba ◽  
Gregory Hall
Keyword(s):  
Low Power ◽  
Temperature Sensitivity ◽  
Pressure Sensor ◽  
Thermal Stresses ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Sensor Nodes ◽  
Capacitive Pressure Sensor ◽  
Element Analysis ◽  
Micro Electro Mechanical Systems

Abstract. Measuring air pressure using a capacitive pressure sensor is a robust and precise technique. In addition, a system that employs such transducers lies within the low power consumption applications such as wireless sensor nodes. In this article a high sensitivity with an elliptical diaphragm capacitive pressure sensor is proposed. This design was compared with a circular diaphragm in terms of thermal stresses and pressure and temperature sensitivity. The proposed sensor is targeted for tyre pressure monitoring system application. Altering the overlapping area between the capacitor plates by decreasing the effective capacitance area to improve the overall sensitivity of the sensor (ΔC ∕ C), temperature sensitivity, and built-up stresses is also examined in this article. Theoretical analysis and finite element analysis (FEA) were employed to study pressure and temperature effects on the behaviour of the proposed capacitive pressure sensor. A MEMS (micro electro-mechanical systems) manufacturing processing plan for the proposed capacitive sensor is presented. An extra-low power short-range wireless read-out circuit suited for energy harvesting purposes is presented in this article. The developed read-out circuitry was tested in terms of sensitivity and transmission range.

scholarly journals High Sensitive MEMS Intraocular Capacitive Pressure Sensor (Glaucoma)

2018 ◽  
Vol 26 (7) ◽  
pp. 150-163
Author(s):  
Tania Mohammed Abbas ◽  
Qais Kareem Al-Gayem
Keyword(s):  
Intraocular Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Metal Plate ◽  
Small Scale ◽  
Capacitive Pressure Sensor ◽  
Clear Fluid ◽  
Micro Electro Mechanical Systems ◽  
Type Device

Micro Electro Mechanical Systems (MEMS) are a small-scale technology that was largely adopted by the IC industry and applied to miniaturize of all systems (electrical systems, mechanical, optical, fluidic, magnetic, etc.). Minimization has been accomplished with small manufacturing processes. A Capacitive pressure sensor is simply a diaphragm-type device in which the diaphragm displacement is determined by measuring the capacitance change between the diaphragm and a metal plate that is close to it. For this purpose, intraocular pressure sensors are important in detection and treatment of an incurable disease called glaucoma. To improve the sensitivity of the capacitive pressure sensor, low stress doped polysilicon material is used as a biocompatible material. Glaucoma is a group of eye diseases that occurs by high intraocular pressure (IOP). IOP is the pressure exerted by the ocular fluid called aqueous humor (the clear fluid inside the eye) that fills the anterior chamber of the eye The results Shows the simulated relation between capacitance and pressure for clamped ++silicon and polysilicon clamped. It can be seen from figure that the initial capacitance for clamped p++ silicon is about 1.81 pF the capacitance varies from 1.81 to 2.162 pF for clamped p++silicon and clamped polysilicon diaphragm, respectively, so the total variation of the capacitance. This result shows the use of poly silicon material in diaphragm is high sensitivity than the p++ silicon.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range

Simulation of Gold Nanoparticles Aggravating MEMS Cantilever Optical Static Detection Biochip

2013 ◽  
Vol 694-697 ◽  
pp. 966-970 ◽  
Author(s):  
Yue Tao Ge ◽  
Xiao Tong Yin
Keyword(s):  
Gold Nanoparticles ◽  
Low Cost ◽  
Mechanical Systems ◽  
Side Wall ◽  
High Sensitivity ◽  
Detection Sensitivity ◽  
Gene Detection ◽  
Micro Electro Mechanical Systems ◽  
Target Dna ◽  
Static Detection

A kind of gene detection biochip model based on biological micro electro mechanical systems (BioMEMS) technology and micro optical electro mechanical systems (MOEMS) technology is designed and simulated. In order to detect whether there are nucleic acid components in the testing samples, the biochip in this study issues horizontal light by laser, then receives and reads the deformation signals of MEMS cantilever by optical detector. The MEMS optical reflecting system can amplify MEMS cantilever deformation signal 22 times by micro reflectors which are set on the side wall of the cantilever free end. In order to improve optical detection sensitivity, gold nanoparticles (GNPs) which are combined with hybridization information is taken to aggravate MEMS cantilever, and employ Au - S chemical bond of GNPs and dithiol HS(CH2)6SH to combine and fix DNA probe, and then employ target DNA which is marked with biotin to combine GNPs by Biotin - Streptavidin combining. The simulation results show that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.

Study of High-Temperature MEMS Pressure Sensor Based on SiC-AlN Structure

2013 ◽  
Vol 562-565 ◽  
pp. 471-476 ◽  
Author(s):  
Hao Jie Lv ◽  
Tao Geng ◽  
Guo Qing Hu
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Sandwich Structure ◽  
High Sensitivity ◽  
High Accuracy ◽  
External Pressure ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor ◽  
Technical Process ◽  
Higher Temperature

In the paper, a touch mode capacitive pressure sensor with double-notches structure is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in hash environment such as high-temperature. The analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has high sensitivity and long linear range simultaneously. In addition, the technical process of the sensor has been designed in detail in the paper. The research shows that the sensor packaged in a high-temperature ceramic AlN can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

Flexible Pressure Sensor Based on Photo Paper-Molded Micro-Structural AgNWs/PDMS Electrode

2015 ◽  
Vol 748 ◽  
pp. 1-4 ◽  
Author(s):  
Li Xin Mo ◽  
Yu Qun Hou ◽  
Qing Bin Zhai ◽  
Wen Guan Zhang ◽  
Lu Hai Li
Keyword(s):  
Pressure Sensor ◽  
Silver Nanowires ◽  
Low Cost ◽  
Flexible Substrate ◽  
High Sensitivity ◽  
Low Energy ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Energy Consuming ◽  
Flexible Pressure Sensor

The novel flexible pressure sensor with skin-like stretchability and sensibility has attracted tremendous attention in academic and industrial world in recent years. And it also has demonstrated great potential in the applications of electronic skin and wearable devices. It is significant and challenging to develop a highly sensitive flexible pressure sensor with a simple, low energy consuming and low cost method. In this paper, the silver nanowires (AgNWs) as electrode material were synthesized by polyol process. The polydimethylsiloxane (PDMS) was chosen as a flexible substrate and polyimide (PI) film as dielectric layer. The AgNWs based electrode was prepared in two methods. One is coating the AgNWs on photographic paper followed by in situ PDMS curing. Another one is suction filtration of the AgNWs suspension followed by glass slide transfer and PDMS curing. Then the capacitive pressure sensor was packaged in a sandwich structure with two face to face electrodes and a PI film in the middle. The sensitivity of the sensor as well as the micro-structure of the electrodes was compared and studied. The results indicate that the roughness of the electrode based on AgNWs/PDMS micro-structure plays an important role in the sensitivity of sensor. The as-prepared flexible pressure sensor demonstrates high sensitivity of 0.65kPa-1. In addition, the fabrication method is simple, low energy consuming and low cost, which has great potential in the detection of pulse, heart rate, sound vibration and other tiny pressure.

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

2020 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Guanzheng Wu ◽  
Siming Li ◽  
Jiayu Hu ◽  
Manchen Dong ◽  
Ke Dong ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Carbon Fibers ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Thermoplastic Elastomer ◽  
Gauge Factor ◽  
Capacitive Pressure Sensor ◽  
Wearable Electronics ◽  
Content Type

Purpose This paper aims to study the working principle of the capacitive pressure sensor and explore the distribution of pressure acting on the surface of the capacitor. Herein, a kind of high sensitivity capacitive pressure sensor was prepared by overlaying carbon fibers (CFs) on the surfaces of the thermoplastic elastomer (TPE), the TPE with high elasticity is a dielectric elastomer for the sensor and the CFs with excellent electrical conductivity were designed as the conductor. Design/methodology/approach Due to the excellent mechanical properties and electrical conductivity of CFs, it was designed as the conductor layer for the TPE/CFs capacitive pressure sensor via laminating CFs on the surfaces of the columnar TPE. Then, a ‘#' type structure of the capacitive pressure sensor was designed and fabricated. Findings The ‘#' type of capacitive pressure sensor of TPE/CFs composite was obtained in high sensitivity with a gauge factor of 2.77. Furthermore, the change of gauge factor values of the sensor under 10 per cent of applied strains was repeated for 1,000 cycles, indicating its outstanding sensing stability. Moreover, the ‘#' type capacitive pressure sensor of TPE/CFs was consisted of several capacitor arrays via laminating CFs, which could detect the distribution of pressure. Research limitations/implications The TPE/CFs capacitive pressure sensor was easily fabricated with high sensitivity and quick responsiveness, which is desirably applied in wearable electronics, robots, medical devices, etc. Originality/value The outcome of this study will help to fabricate capacitive pressure sensors with high sensitivity and outstanding sensing stability.

Stress and frequency analysis of silicon diaphragm of MEMS based piezoresistive pressure sensor

2019 ◽  
Vol 33 (07) ◽  
pp. 1950040 ◽  
Author(s):  
Samridhi ◽  
Manish Kumar ◽  
Sachin Dhariwal ◽  
Kulwant Singh ◽  
P. A. Alvi
Keyword(s):  
Frequency Analysis ◽  
Pressure Sensor ◽  
Dynamic Environment ◽  
High Sensitivity ◽  
Vibrational Modes ◽  
Piezoresistive Effect ◽  
Micro Electro Mechanical Systems ◽  
Enhanced Sensitivity ◽  
Piezoresistive Pressure Sensor ◽  
Frame Work

This paper reports the stress and frequency analysis of dynamic silicon diaphragm during the simulation of micro-electro-mechanical-systems (MEMS) based piezoresistive pressure sensor with the help of finite element method (FEM) within the frame work of COMSOL software. Vibrational modes of rectangular diaphragm of piezoresistive pressure sensor have been determined at different frequencies for different pressure ranges. Optimal frequency range for particular applications for any diaphragm is a very important so that MEMS sensors performance should not degrade during the dynamic environment. Therefore, for the MEMS pressure sensor having applications in dynamic environment, the diaphragm frequency of 280 KHz has been optimized for the diaphragm thickness of 50 [Formula: see text]m and hence this frequency can be considered for showing the better piezoresistive effect and high sensitivity. Moreover, the designed pressure sensor shows the high linearity and enhanced sensitivity of the order of ([Formula: see text]0.5066 mV/psi).

Sign in / Sign up

Export Citation Format

Share Document