Determination of mechanical properties of porous silica low-k films on Si substrates using orientation dependence of surface acoustic wave

2007 ◽  
Author(s):  
Toshinori Takimura ◽  
Nobuhiro Hata ◽  
Syozo Takada ◽  
Takenobu Yoshino
Keyword(s):  
Mechanical Properties ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Porous Silica ◽  
Orientation Dependence ◽  
Si Substrates ◽  
Low K

High-throughput microfluidic compressibility cytometry using multi-tilted-angle surface acoustic wave

Lab on a Chip ◽  
2021 ◽  
Author(s):  
Yanqi Wu ◽  
Alastair Stewart ◽  
Peter Vee-Sin Lee
Keyword(s):  
Mechanical Properties ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Throughput ◽  
Mechanical Measurement ◽  
Cellular Processes ◽  
Tilted Angle

Cellular mechanical properties (e.g. compressibility) are important biophysical markers in relation to cellular processes and functionality. Among the methods for cell mechanical measurement, acoustofluidic methods appear to be advantageous due...

Rapid Determination of Acid Phosphatase by a Surface Acoustic Wave Impedance Sensor

1996 ◽  
Vol 29 (1) ◽  
pp. 59-72 ◽  
Author(s):  
R. Wang ◽  
Q. Y. Cai ◽  
L. Wu ◽  
L. H. Nie ◽  
S. Z. Yao
Keyword(s):  
Acid Phosphatase ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Rapid Determination ◽  
Wave Impedance ◽  
Impedance Sensor

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

2019 ◽  
Vol 126 (7) ◽  
pp. 075106 ◽  
Author(s):  
Nicolas Kurz ◽  
Anli Ding ◽  
Daniel F. Urban ◽  
Yuan Lu ◽  
Lutz Kirste ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Experimental Determination ◽  
Surface Acoustic Wave ◽  
Acoustic Properties ◽  
Acoustic Wave Resonators
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