gallium nitride film
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XPS Analysis of Gallium Nitride Film After O2/BCL3 Digital Etch

2020 ◽  
Author(s):  
Jiale Tang ◽  
Yongjie Hu ◽  
Yudong Zhang ◽  
Zhiqiang Gu ◽  
Dongchen Che ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Nitride Film ◽  
Xps Analysis ◽  
Gallium Nitride Film

scholarly journals Поверхностные поляритоны в пленках нитридов алюминия и галлия, легированных кремнием

2019 ◽  
Vol 127 (7) ◽  
pp. 42
Author(s):  
Н.Н. Новикова ◽  
В.А. Яковлев ◽  
С.А. Климин ◽  
Т.В. Малин ◽  
А.М. Гилинский ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Aluminum Nitride ◽  
Total Reflection ◽  
Attenuated Total Reflection ◽  
Charge Carriers ◽  
Nitride Film ◽  
High Concentration ◽  
Sapphire Substrates ◽  
Phonon Polaritons ◽  
Gallium Nitride Film

AbstractThe reflection and attenuated total reflection spectra of aluminum and gallium nitride films doped with silicon on sapphire substrates with a buffer layer of aluminum nitride have been measured. In the spectra of attenuated total reflection, surface phonon and plasmon–phonon polaritons were observed. A high concentration of charge carriers in the gallium nitride film and their practical absence in the aluminum nitride film were experimentally observed.

Effect of Gallium Nitride Film Growth Conditions on Surface Segregation

2018 ◽  
Vol 54 (1) ◽  
pp. 26-31
Author(s):  
Yu. Ya. Tomashpolsky ◽  
V. M. Matyuk ◽  
N. V. Sadovskaya
Keyword(s):  
Gallium Nitride ◽  
Surface Segregation ◽  
Film Growth ◽  
Growth Conditions ◽  
Nitride Film ◽  
Gallium Nitride Film

Effect of sputtering deposition process of indium tin oxynitride on surface damage of gallium nitride film

2017 ◽  
Vol 109 ◽  
pp. 750-757
Author(s):  
Lifei Tian ◽  
Guoan Cheng ◽  
Ruiting Zheng ◽  
Kun Tian ◽  
Xiaolu Yan ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Surface Damage ◽  
Deposition Process ◽  
Nitride Film ◽  
Sputtering Deposition ◽  
Gallium Nitride Film

Growth and optical properties of gallium nitride film on glass substrates

2015 ◽  
Vol 13 (5-6) ◽  
pp. 200-204 ◽  
Author(s):  
Pingbo An ◽  
Lixia Zhao ◽  
Shuo Zhang ◽  
Lei Liu ◽  
Ruifei Duan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Gallium Nitride ◽  
Nitride Film ◽  
Glass Substrates ◽  
Gallium Nitride Film

Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System

2012 ◽  
Vol 51 (1) ◽  
pp. 01AF02 ◽  
Author(s):  
K. Scott A. Butcher ◽  
Brad W. Kemp ◽  
Ilian B. Hristov ◽  
Penka Terziyska ◽  
Peter W. Binsted ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Nitride Film ◽  
Gallium Nitride Film

Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System

2012 ◽  
Vol 51 (1S) ◽  
pp. 01AF02 ◽  
Author(s):  
K. Scott A. Butcher ◽  
Brad W. Kemp ◽  
Ilian B. Hristov ◽  
Penka Terziyska ◽  
Peter W. Binsted ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Nitride Film ◽  
Gallium Nitride Film

Ammonothermal synthesis of thick gallium nitride film employing acidic mineralizers

2007 ◽  
Vol 43 (7) ◽  
pp. 2270-2275 ◽  
Author(s):  
Dirk Ehrentraut ◽  
Yuji Kagamitani ◽  
Akira Yoshikawa ◽  
Naruhiro Hoshino ◽  
Hirohisa Itoh ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Nitride Film ◽  
Gallium Nitride Film

Deep etching of epitaxial gallium nitride film by multiwavelength excitation process using F2 and KrF excimer lasers

2005 ◽  
Vol 82 (3) ◽  
pp. 479-483 ◽  
Author(s):  
K. Obata ◽  
K. Sugioka ◽  
K. Midorikawa ◽  
T. Inamura ◽  
H. Takai
Keyword(s):  
Gallium Nitride ◽  
Nitride Film ◽  
Excimer Lasers ◽  
Excitation Process ◽  
Deep Etching ◽  
Gallium Nitride Film
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