XPS Analysis of Gallium Nitride Film After O2/BCL3 Digital Etch
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2015 ◽
Vol 13
(5-6)
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pp. 200-204
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2007 ◽
Vol 43
(7)
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pp. 2270-2275
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2012 ◽
Vol 51
(1)
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pp. 01AF02
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