Advances in silicon membrane and microvalve technology continue to be made. Microvalves utilizing membranes have always encompassed the attribute of an on-off switch, thereby suggesting a logic element, although their main application has been arguably as a proportional flow control device. Recently, an analogy has been suggested between a microelectronic, p-channel MOSFET, and a microvalve. The analogy includes a qualitative comparison between the flow vs. pressure relationship for the microvalve, and the current vs. voltage relationship for the MOSFET. It also includes a simple, small-signal frequency analysis of microvalve flow, based on a ‘saturation’ flow behavior chosen arbitrarily to be similar to that in a MOSFET. In this work, a quantitative and rigorous model for the flow vs. pressure relationship for a microvalve is presented. The model couples the mechanical behavior of a silicon membrane, with the fluid mechanical behavior facilitated by the membrane’s motion. The model is substantiated by measurements. The model is compared by analogy to the related MOSFET model equations. The pneumatic model is then applied to both a normally-closed microvalve, and a normally-closed poppet valve. The normally-closed microvalve is analogous to a p-MOSFET. The normally-closed poppet microvalve is analogous to an n-MOSFET. By appropriate physical coupling of these two devices, a fully complementary pneumatic NOR gate results. The quantitative pneumatic flow model is applied to this structure, and the logic transfer function is obtained. The ramifications of the results for scaled, micro-pneumatic logic devices will be discussed.