scholarly journals Modeling and Experimental Study of a Remote Microwave Plasma Source for High‐Rate Etching

2022 ◽  
Author(s):  
Steffen Pauly ◽  
Andreas Schulz ◽  
Matthias Walker ◽  
Moritz Gorath ◽  
Klaus Baumgärtner ◽  
...  
Keyword(s):  
Experimental Study ◽  
Microwave Plasma ◽  
Plasma Source ◽  
High Rate

Fast Deposition of Highly Crystallized Microcrystalline Si Films Utilizing a High-Density Microwave Plasma Source for Si Thin Film Solar Cells

2006 ◽  
Vol 910 ◽  
Author(s):  
Haijun Jia ◽  
Hajime Shirai ◽  
Michio Kondo
Keyword(s):  
Deposition Rate ◽  
Microwave Plasma ◽  
Defect Density ◽  
Mass Density ◽  
Plasma Source ◽  
High Density ◽  
High Rate ◽  
Substrate Bias ◽  
Si Films ◽  
Gas Supply

AbstractIn this work, we investigate the influences of source gas supply method and dc substrate bias on the deposition rate as well as structural properties of μc-Si films and demonstrate the high rate synthesis of highly crystallized μc-Si films with improved film density by using a high-density and low-temperature microwave plasma source. A high flux of SiH3 and atomic hydrogen on film growing surface achieved through adjusting SiH4 gas supply configuration is effective for the fast deposition of highly crystallized μc-Si films and for the improvement of film mass density. Appropriate ion bombardment under moderate negative dc substrate bias along with the suppression of contributions of detrimental species to film growth also account for the improvement in properties of resulting films. As a consequence, a very fast deposition rate of ~65 Å/s was achieved with a high Raman crystallinity Ic/Ia>3 and a low defect density of (1-2)×1016 cm-3 despite a high silane concentration of 67%.

Experimental study of high rate pond system treating piggery wastewater

1996 ◽  
Vol 34 (11) ◽  
pp. 125-132 ◽  
Author(s):  
Baozhen Wang ◽  
Wenyi Dong ◽  
Jinlan Zhang ◽  
Xiangdong Cao
Keyword(s):  
Experimental Study ◽  
Energy Consumption ◽  
Flow Pattern ◽  
Fish Farming ◽  
High Rate ◽  
Land Area ◽  
Piggery Wastewater ◽  
Hydraulic Flow ◽  
Pond System ◽  
Economic Analyses

The results of an experimental study conducted in a full-scale high rate pond system treating piggery wastewater at Jianfengshan Piggery, Panyu City, Guandong Province, are presented. The system consists of two advanced anaerobic ponds (AAP) in parallel, followed by an anaerobic transformation pond (ATP) and a five-cell algae-bacterial pond (ABP). The mechanism of the AAP is described and the hydraulic flow pattern analyzed. Fermentation pits (FP) built on the bottom performed very efficiently, operating like UASB in principle. A new concept of ATP is advanced, based on its ability to transform poorly degradable materials to more easily degradable ones. It was found in the study that the HRP system was more efficient, more reliable and saved 40% land area compared with a conventional pond system. Economic analyses of both the energy consumption and the benefit to the pond system of fish farming are also included in the paper.

Simple low‐cost microwave plasma source

1986 ◽  
Vol 57 (2) ◽  
pp. 164-166 ◽  
Author(s):  
L. G. Meiners ◽  
D. B. Alford
Keyword(s):  
Microwave Plasma ◽  
Low Cost ◽  
Plasma Source

scholarly journals A Linear Microwave Plasma Source Using a Circular Waveguide Filled with a Relatively High-Permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide

2021 ◽  
Vol 11 (12) ◽  
pp. 5358
Author(s):  
Ju-Hong Cha ◽  
Sang-Woo Kim ◽  
Ho-Jun Lee
Keyword(s):  
Electron Density ◽  
Microwave Plasma ◽  
Circular Waveguide ◽  
Coaxial Line ◽  
Plasma Source ◽  
Tangential Plane ◽  
High Permittivity ◽  
Deposition Area ◽  
Extended Plasma ◽  
Transverse Electromagnetic

For a conventional linear microwave plasma source (LMPS) with a quasi-coaxial line transverse electromagnetic (TEM) waveguide, a linearly extended plasma is sustained by the surface wave outside the tube. Due to the characteristics of the quasi-coaxial line MPS, it is easy to generate a uniform plasma with radially omnidirectional surfaces, but it is difficult to maximize the electron density in a curved selected region. For the purpose of concentrating the plasma density in the deposition area, a novel LMPS which is suitable for curved structure deposition has been developed and compared with the conventional LMPS. As the shape of a circular waveguide, it is filled with relatively high-permittivity dielectric instead of a quasi-coaxial line waveguide. Microwave power at 2.45 GHz is transferred to the plasma through the continuous cylindrical-slotted line antenna, and the radiated electric field in the radial direction is made almost parallel to the tangential plane of the window surface. This research includes the advanced 3D numerical analysis and compares the results with the experiment. It shows that the electron density in the deposition area is higher than that of the conventional quasi-coaxial line plasma MPS.

Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source

2011 ◽  
Vol 39 (11) ◽  
pp. 2906-2907 ◽  
Author(s):  
Helena Nowakowska ◽  
Mariusz Jasinski ◽  
Jerzy Mizeraczyk
Keyword(s):  
Numerical Analysis ◽  
Microwave Plasma ◽  
Plasma Source
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