A Comparative Study of Structure and Residual Stress in Chromium Nitride Films Deposited by Vacuum Arc Evaporation, Ion Plating, and DC Magnetron Sputtering
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2011 ◽
Vol 205
(19)
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pp. 4582-4595
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1996 ◽
Vol 86-87
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pp. 254-262
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1997 ◽
Vol 94-95
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pp. 409-415
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2015 ◽
Vol 662
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pp. 107-110
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2017 ◽
Vol 9
(6)
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pp. 885-891
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