Reliability assessment of indium tin oxide thin films by accelerated degradation test

2006 ◽  
Vol 17 (2-4) ◽  
pp. 955-958 ◽  
Author(s):  
Yong-Nam Kim ◽  
Seong-Min Jeong ◽  
Min-Seok Jeon ◽  
Hyun-Gyoo Shin ◽  
Jun-Kwang Song ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Reliability Assessment ◽  
Oxide Thin Films ◽  
Accelerated Degradation ◽  
Degradation Test ◽  
Accelerated Degradation Test

Accelerated Degradation Test of Indium Tin Oxide (ITO) Thin Films Deposited by RF Magnetron Sputter

2006 ◽  
Vol 317-318 ◽  
pp. 577-580 ◽  
Author(s):  
Hyun Gyu Shin ◽  
Yong Nam Kim ◽  
Jun Kwang Song ◽  
Hee Soo Lee
Keyword(s):  
Thin Film ◽  
Failure Mechanism ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Charge Carrier Concentration ◽  
Accelerated Degradation ◽  
Short Period ◽  
Degradation Test ◽  
Accelerated Degradation Test

Thermal degradation of indium tin oxide (ITO) thin film has been investigated. ITO thin film was fabricated on glass substrate using RF magnetron sputtering and was characterized. The resistivity of the film which was thermally degraded at high temperatures in air atmosphere was increased highly. Thermally-degraded specimen was analyzed using XPS and Hall measurement to reveal failure mechanism. Result showed that failure mechanism was the decrease in charge carrier concentration and mobility due to oxygen diffusion and chemisorption. Accelerated degradation test (ADT) was performed to predict the lifetime of ITO thin film. The lifetime under normal operating condition could be predicted via statistical analysis and modeling of data acquired from ADT of a short period.

Plasma-assisted deposition of indium tin oxide thin films by sublimation using an anodic vacuum arc discharge

2021 ◽  
pp. 138731
Author(s):  
Bert Scheffel ◽  
Olaf Zywitzki ◽  
Thomas Preußner ◽  
Torsten Kopte
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Oxide Thin Films

Study on the physical properties of indium tin oxide thin films deposited by microwave-assisted spray pyrolysis

2017 ◽  
Vol 728 ◽  
pp. 1338-1345 ◽  
Author(s):  
Lihua Zhang ◽  
Jianbo Lan ◽  
Jianyu Yang ◽  
Shenghui Guo ◽  
Jinhui Peng ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Spray Pyrolysis ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Microwave Assisted

Optical Degradation of Indium Tin Oxide Thin Films Induced by Hydrogen-Related Room Temperature Reduction

2003 ◽  
Vol 42 (Part 2, No. 5B) ◽  
pp. L546-L548 ◽  
Author(s):  
Yu Wang ◽  
Wan Ping Chen ◽  
Kei Chun Cheng ◽  
Helen Lai Wah Chan ◽  
Chung Loong Choy
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Thin Films ◽  
Temperature Reduction
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