Gate Oxide Short Defect Model in FinFETs

2018 ◽  
Vol 34 (3) ◽  
pp. 351-362
Author(s):  
Roya Dibaj ◽  
Dhamin Al-Khalili ◽  
Maitham Shams
Keyword(s):  
Gate Oxide ◽  
Defect Model ◽  
Gate Oxide Short

A Novel Electrical Test by C-AFM to Differentiate Gate-to-S/D Gate Oxide Short From Non-Gate Oxide Short Defect in Real Products

2004 ◽  
Author(s):  
Cheng-Piao Lin ◽  
Cheng-Hsu Wu ◽  
Cheng-Chun Ting
Keyword(s):  
Atomic Force Microscopy ◽  
Short Path ◽  
Gate Oxide ◽  
Electrical Test ◽  
Force Microscopy ◽  
Atomic Force ◽  
Gate Oxide Short ◽  
Voltage Contrast

Abstract A method to differentiate Gate-to-S/D Gate Oxide Short from non-Gate Oxide Short defect in real products by analyzing the I-V curves acquired by Conducting-Atomic Force Microscopy (C-AFM) is presented. The method allows not only the correct short path to be identified, but also allows differentiation of gate-to-S/D GOS from non-GOS problems, which cannot be reached by passive voltage contrast (PVC) only.

Gate-oxide-short defect analysis and fault modeling in FinFETs

2022 ◽  
Vol 129 ◽  
pp. 114464
Author(s):  
Roya Dibaj ◽  
Dhamin Al-Khalili ◽  
Maitham Shams ◽  
Saman Adham
Keyword(s):  
Gate Oxide ◽  
Fault Modeling ◽  
Defect Analysis ◽  
Gate Oxide Short

A compact DC model of gate oxide short defect

2004 ◽  
Vol 72 (1-4) ◽  
pp. 140-148 ◽  
Author(s):  
R. Bouchakour ◽  
J.M. Portal ◽  
J.M. Gallière ◽  
F. Azais ◽  
Y. Bertrand ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Gate Oxide Short

Diagnosis of CMOS op-amps with gate oxide short faults using multilayer perceptrons

1997 ◽  
Vol 16 (8) ◽  
pp. 930-935 ◽  
Author(s):  
S. Yu ◽  
B.W. Jervis ◽  
K.R. Eckersall ◽  
I.M. Bell
Keyword(s):  
Gate Oxide ◽  
Multilayer Perceptrons ◽  
Op Amps ◽  
Gate Oxide Short

CURRENT VS. LOGIC TESTING OF GATE OXIDE SHORT, FLOATING GATE AND BRIDGING FAILURES IN CMOS

2005 ◽  
Author(s):  
R. Rodriguez-Montanes ◽  
J.A. Segura ◽  
V.H. Champac ◽  
J. Figueras ◽  
J.A. Rubio
Keyword(s):  
Gate Oxide ◽  
Floating Gate ◽  
Logic Testing ◽  
Gate Oxide Short
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