Effect of Substrate Temperature on Optical Properties of Aluminum Zinc Oxide Thin Films Deposited by DC Magnetron Sputtering

2011 ◽  
Author(s):  
B. Rajesh Kumar ◽  
T. Subba Rao ◽  
P. Predeep ◽  
Mrinal Thakur ◽  
M. K. Ravi Varma
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Aluminum Zinc Oxide

Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

2011 ◽  
Vol 519 (20) ◽  
pp. 6910-6915 ◽  
Author(s):  
Hyeongsik Park ◽  
Kyungsoo Jang ◽  
Krishna Kumar ◽  
Shihyun Ahn ◽  
Jaehyun Cho ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Mechanism Analysis ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films
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