Electron beam induced current (EBIC) as a function of the angle of incidence of the electron beam in a scanning electron microscope (SEM)
1982 ◽
Vol 25
(7)
◽
pp. 651-653
◽
2018 ◽
Vol 61
(6)
◽
pp. 862-868
1991 ◽
Vol 49
◽
pp. 478-479
1992 ◽
Vol 50
(2)
◽
pp. 1308-1309
2007 ◽
Vol 25
(6)
◽
pp. 1771
◽
Measurement of the Electron Beam Point Spread Function (PSF) in a Scanning Electron Microscope (SEM)
2015 ◽
Vol 21
(S3)
◽
pp. 699-700
◽
2015 ◽
Vol 9
(5)
◽
pp. 944-947
◽