Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon
1996 ◽
Vol 159
(1-4)
◽
pp. 156-160
◽
2001 ◽
Vol 80
(1-3)
◽
pp. 130-133
◽
2001 ◽
Vol 16
(5)
◽
pp. 1245-1248
◽
Keyword(s):
1983 ◽
Vol 22
(Part 2, No. 2)
◽
pp. L118-L120
◽
Keyword(s):
2001 ◽
Vol 40
(Part 1, No. 4A)
◽
pp. 2150-2154
◽
Keyword(s):