MEMS Structures for On-chip Testing of Mechanical and Surface Properties of Thin Films

2003 ◽  
pp. 325-356 ◽  
Author(s):  
R. Ballarini ◽  
H. Kahn ◽  
A.H. Heuer ◽  
M.P. De Boer ◽  
M.T. Dugger
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Chip Testing ◽  
On Chip

scholarly journals A Stochastic Model to Describe the Scattering in the Response of Polysilicon MEMS

2021 ◽  
Vol 2 (1) ◽  
pp. 95
Author(s):  
Luca Dassi ◽  
Marco Merola ◽  
Eleonora Riva ◽  
Angelo Santalucia ◽  
Andrea Venturelli ◽  
...  
Keyword(s):  
Silicon Film ◽  
Micro Fabrication ◽  
Micro Electro Mechanical Systems ◽  
Local Fluctuations ◽  
Stochastic Framework ◽  
On Line ◽  
Chip Testing ◽  
On Chip ◽  
Time Required ◽  
Polycrystalline Silicon Film

The current miniaturization trend in the market of inertial microsystems is leading to movable device parts with sizes comparable to the characteristic length-scale of the polycrystalline silicon film morphology. The relevant output of micro electro-mechanical systems (MEMS) is thus more and more affected by a scattering, induced by features resulting from the micro-fabrication process. We recently proposed an on-chip testing device, specifically designed to enhance the aforementioned scattering in compliance with fabrication constraints. We proved that the experimentally measured scattering cannot be described by allowing only for the morphology-affected mechanical properties of the silicon films, and etch defects must be properly accounted for too. In this work, we discuss a fully stochastic framework allowing for the local fluctuations of the stiffness and of the etch-affected geometry of the silicon film. The provided semi-analytical solution is shown to catch efficiently the measured scattering in the C-V plots collected through the test structure. This approach opens up the possibility to learn on-line specific features of the devices, and to reduce the time required for their calibration.

Surface Properties of Bottlebrush Polymer Thin Films

2012 ◽  
Vol 45 (17) ◽  
pp. 7118-7127 ◽  
Author(s):  
Xianyu Li ◽  
Stacy L. Prukop ◽  
Sibani Lisa Biswal ◽  
Rafael Verduzco
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Polymer Thin Films

Effect of low-temperature plasma treatment and γ-irradiation on the surface properties of thin films based on polylactic acid

2020 ◽  
Vol 6 ◽  
pp. 40-55
Author(s):  
N.M. Ivanova ◽  
◽  
E.O. Filippova ◽  
A.N. Aleinik ◽  
V.F. Pichugin ◽  
...  
Keyword(s):  
Thin Films ◽  
Contact Angle ◽  
Low Temperature ◽  
Polylactic Acid ◽  
Surface Properties ◽  
Polar Component ◽  
Low Temperature Plasma ◽  
Plasma Exposure ◽  
Γ Irradiation ◽  
Temperature Plasma

Effects of the low-temperature plasma exposure, γ-irradiation, and joint g-irradiation and plasma exposure on the structure and surface properties of thin films based on polylactic acid (PLA) have been investigated. Films were obtained by the method a solvent-casting. It has been shown that films based on polylactic acid have topographically different sides: a smoother inner side and embossed outer one. PLA films have properties close to those hydrophobic, with a contact angle in the range of 70°-73° regardless of the surface side and belong to a weakly polar materials. The combined effect of plasma and gamma radiation slightly changes the surface topography. The effect of low-temperature plasma on the surface of the films leads to a decrease in the contact angle by 13°-55° (9-11%) and an increase in surface energy due to the polar component. The results of in vivo experiments on rabbits are presented. Biomicroscopy, optical coherence tomography, morphological and electron microscopic examination of the cornea after implantation of initial and radiation and plasma treated films showed that implantation of the films in the anterior chamber is not accompanied by a pronounced inflammatory reaction and increased intraocular pressure, while maintaining the morphological structure of the cornea almost unchanged.

A Novel MEMS-Based Technique for In-Situ Characterization of Freestanding Nanometer Scale Thin Films Inside SEM and TEM

2001 ◽  
Author(s):  
M. A. Haque ◽  
M. T. A. Saif
Keyword(s):  
Thin Films ◽  
Tensile Testing ◽  
Uniaxial Tensile ◽  
Aluminum Specimen ◽  
Sem And Tem ◽  
Uniaxial Tensile Testing ◽  
Testing Facility ◽  
Film Specimen ◽  
On Chip

Abstract We present a MEMS-based technique for in-situ uniaxial tensile testing of freestanding thin films inside SEM and TEM. It integrates a freestanding thin film specimen with MEMS force sensors and structures to produce an on-chip tensile testing facility. Cofabrication of the specimen with force and displacement measuring mechanisms produces the following unique features: 1) Quantitative experimentation can be carried out in both SEM and TEM, 2) No extra gripping mechanism is required, 3) Specimen misalignment can be eliminated, 4) Pre-stress in specimen can be determined, and 5) Specimens with micrometer to nanometer thickness can be tested. We demonstrate the technique by testing a 200-nanometer thick Aluminum specimen in-situ in SEM. Significant strengthening and anelasticity were observed at this size scale.

The electrical, elemental, optical, and surface properties of Si-doped ZnO thin films prepared by thermionic vacuum arc

2017 ◽  
Vol 4 (9) ◽  
pp. 096404 ◽  
Author(s):  
Reza Mohammadigharehbagh ◽  
Soner Özen ◽  
Hafizittin Hakan Yudar ◽  
Suat Pat ◽  
Şadan Korkmaz
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Si Doped ◽  
Doped Zno ◽  
Thermionic Vacuum Arc
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