Modeling of lightly-doped drain and source contact with boron and nitrogen in graphene nanoribbon

2019 ◽  
Vol 62 ◽  
pp. 258-273 ◽  
Author(s):  
Kien Liong Wong ◽  
Beng Rui Tan ◽  
Mu Wen Chuan ◽  
Afiq Hamzah ◽  
Shahrizal Rusli ◽  
...  
2013 ◽  
Vol 60 ◽  
pp. 67-72 ◽  
Author(s):  
Mehdi Saremi ◽  
Maryam Saremi ◽  
Hamid Niazi ◽  
Arash Yazdanpanah Goharrizi

Author(s):  
Satish Kodali ◽  
Chen Zhe ◽  
Chong Khiam Oh

Abstract Nanoprobing is one of the key characterization techniques for soft defect localization in SRAM. DC transistor performance metrics could be used to identify the root cause of the fail mode. One such case report where nanoprobing was applied to a wafer impacted by significant SRAM yield loss is presented in this paper where standard FIB cross-section on hard fail sites and top down delayered inspection did not reveal any obvious defects. The authors performed nanoprobing DC characterization measurements followed by capacitance-voltage (CV) measurements. Two probe CV measurement was then performed between the gate and drain of the device with source and bulk floating. The authors identified valuable process marginality at the gate to lightly doped drain overlap region. Physical characterization on an inline split wafer identified residual deposits on the BL contacts potentially blocking the implant. Enhanced cleans for resist removal was implemented as a fix for the fail mode.


2015 ◽  
Vol 55 (8) ◽  
pp. 1262-1268 ◽  
Author(s):  
Amin Bagheri ◽  
Mahboubeh Ranjbar ◽  
Saeed Haji-Nasiri ◽  
Sattar Mirzakuchaki

Nanomaterials ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 1302
Author(s):  
Zhiyong Wu ◽  
Lei Zhang ◽  
Tingyin Ning ◽  
Hong Su ◽  
Irene Ling Li ◽  
...  

Surface plasmon polaritons (SPPs) have been attracting considerable attention owing to their unique capabilities of manipulating light. However, the intractable dispersion and high loss are two major obstacles for attaining high-performance plasmonic devices. Here, a graphene nanoribbon gap waveguide (GNRGW) is proposed for guiding dispersionless gap SPPs (GSPPs) with deep-subwavelength confinement and low loss. An analytical model is developed to analyze the GSPPs, in which a reflection phase shift is employed to successfully deal with the influence caused by the boundaries of the graphene nanoribbon (GNR). It is demonstrated that a pulse with a 4 μm bandwidth and a 10 nm mode width can propagate in the linear passive system without waveform distortion, which is very robust against the shape change of the GNR. The decrease in the pulse amplitude is only 10% for a propagation distance of 1 μm. Furthermore, an array consisting of several GNRGWs is employed as a multichannel optical switch. When the separation is larger than 40 nm, each channel can be controlled independently by tuning the chemical potential of the corresponding GNR. The proposed GNRGW may raise great interest in studying dispersionless and low-loss nanophotonic devices, with potential applications in the distortionless transmission of nanoscale signals, electro-optic nanocircuits, and high-density on-chip communications.


Nano Letters ◽  
2021 ◽  
Author(s):  
Qiucheng Li ◽  
Xiaolong Liu ◽  
Eden B. Aklile ◽  
Shaowei Li ◽  
Mark C. Hersam

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