scholarly journals In situ spectroscopic ellipsometry monitoring of diamond multilayers grown by microwave plasma enhanced chemical vapor deposition

2018 ◽  
Vol 86 ◽  
pp. 41-46
Author(s):  
J. Bousquet ◽  
F. Jomard ◽  
E. Bustarret ◽  
D. Eon
Keyword(s):  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor

In situ diagnosis of chemical species for the growth of carbon nanotubes in microwave plasma-enhanced chemical vapor deposition

2002 ◽  
Vol 11 (1) ◽  
pp. 59-66 ◽  
Author(s):  
Yun Sung Woo ◽  
Duk Young Jeon ◽  
In Taek Han ◽  
Nae Sung Lee ◽  
Jae Eun Jung ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Species ◽  
Chemical Vapor

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

1999 ◽  
Vol 38 (Part 2, No. 6A/B) ◽  
pp. L632-L635 ◽  
Author(s):  
Shuu'ichirou Yamamoto ◽  
Satoshi Sugai ◽  
Yasunari Matsukawa ◽  
Akio Sengoku ◽  
Hiroshi Tobisaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Spectroscopic Ellipsometry ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Monitoring ◽  
In Situ Growth ◽  
Metalorganic Chemical
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