Improved Silicon Surface Passivation of APCVD Al2O3 by Rapid Thermal Annealing
2019 ◽
Vol 52
(34)
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pp. 345102
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2015 ◽
Vol 357
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pp. 635-642
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Keyword(s):
2007 ◽
Vol 91
(2-3)
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pp. 174-179
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2015 ◽
Vol 54
(4)
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pp. 041402
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