Capacitance response characteristics of hydrogen sensor with tantalum oxide dielectric layer

2018 ◽  
Vol 43 (42) ◽  
pp. 19810-19815 ◽  
Author(s):  
Seongjeen Kim
Keyword(s):  
Dielectric Layer ◽  
Tantalum Oxide ◽  
Hydrogen Sensor ◽  
Response Characteristics ◽  
Capacitance Response

scholarly journals Effect of Palladium Electrode Patterns on Hydrogen Response Characteristics from a Sensor Based on Ta2O5 Film on SiC at High Temperatures

Sensors ◽  
2019 ◽  
Vol 19 (24) ◽  
pp. 5478 ◽  
Author(s):  
Kyeong-Keun Choi ◽  
Seongjeen Kim
Keyword(s):  
Thermal Stability ◽  
High Temperatures ◽  
Breakdown Strength ◽  
Hydrogen Sensor ◽  
Area Ratio ◽  
Hydrogen Sensors ◽  
Dielectric Thin Film ◽  
Response Characteristics ◽  
Ta2o5 Film ◽  
Sensor Structure

Our study aims to fabricate a hydrogen sensor based on thermal stability analysis of Ta2O5 film, and to determine the effect of Pd electrodes on the hydrogen sensor at high temperatures. First, in order to ensure high-temperature stability of silicon carbide (SiC)-based hydrogen sensors, the thermal stability of Ta2O5 dielectric thin film at temperatures above 900 °C was studied. The sensor structure consisted of a metal-insulator-semiconductor (MIS) and a tantalum oxide (Ta2O5) dielectric film was formed by rapid thermal oxidation (RTO). The Ta2O5 film was assessed through SEM, TEM, SIMS, and dielectric breakdown strength to observe thermal stability. Secondly, hydrogen sensors using a SiC substrate were fabricated, with the process considering thermal stability. The response characteristics for hydrogen were evaluated using three types of sensors with different Pd electrode patterns. The patterns of the Pd electrode were designed as squares or grid shapes, and were characterized by 100%, 75%, and 50% area ratios of Pd electrodes covering the Ta2O5 layer. The results showed that the sensor with a 100% area ratio of the Pd electrode had better sensitivity and linear response characteristics compared to sensors with a 50% area ratio of the Pd electrode.

scholarly journals Response Characteristics of Silicon Microring Resonator Hydrogen Sensor

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 795
Author(s):  
Naoki Yamasaku ◽  
Sosuke Matsuura ◽  
Yoshiaki Nishijima ◽  
Taro Arakawa ◽  
Shinji Okazaki
Keyword(s):  
Sol Gel ◽  
Hydrogen Sensor ◽  
Hydrogen Gas ◽  
Microring Resonator ◽  
Wavelength Shift ◽  
Pure Hydrogen ◽  
Sensitive Layer ◽  
Response Characteristics ◽  
Gel Technique ◽  
Resonant Wavelength Shift

A silicon microring-resonator (MRR) hydrogen sensor which utilizes platinum-loaded tungsten oxide (Pt/WO3) thin film was fabricated and evaluated. The uniform film was deposited on MRR portion by using sol-gel technique. By the exposure to pure hydrogen gas, the sensor devise showed the large resonant wavelength shift at room temperature. It is suggested that the change in the optical properties of hydrogen sensitive layer results in this response.

Smoothing Facilitates the Detection of Coupled Responses in Psychophysiological Time Series

2000 ◽  
Vol 14 (1) ◽  
pp. 1-10 ◽  
Author(s):  
Joni Kettunen ◽  
Niklas Ravaja ◽  
Liisa Keltikangas-Järvinen
Keyword(s):  
Time Series ◽  
Type I Error ◽  
Electrodermal Activity ◽  
Moving Average ◽  
Type I ◽  
Facial Electromyography ◽  
Response Characteristics ◽  
Smoothing Methods ◽  
Response Systems ◽  
Different Response

Abstract We examined the use of smoothing to enhance the detection of response coupling from the activity of different response systems. Three different types of moving average smoothers were applied to both simulated interbeat interval (IBI) and electrodermal activity (EDA) time series and to empirical IBI, EDA, and facial electromyography time series. The results indicated that progressive smoothing increased the efficiency of the detection of response coupling but did not increase the probability of Type I error. The power of the smoothing methods depended on the response characteristics. The benefits and use of the smoothing methods to extract information from psychophysiological time series are discussed.

Interpreting Open- and Closed-Loop Transfer Relations Between Cardiorespiratory Parameters: Lessons Learned from a Computer Model of Beat-to-Beat Cardiovascular Regulation

1997 ◽  
Vol 36 (04/05) ◽  
pp. 237-240
Author(s):  
P. Hammer ◽  
D. Litvack ◽  
J. P. Saul
Keyword(s):  
Computer Model ◽  
Closed Loop ◽  
Computer Models ◽  
Cardiovascular Regulation ◽  
Cardiovascular Control ◽  
Lessons Learned ◽  
Multiple Systems ◽  
Response Characteristics ◽  
Similarities And Differences

Abstract:A computer model of cardiovascular control has been developed based on the response characteristics of cardiovascular control components derived from experiments in animals and humans. Results from the model were compared to those obtained experimentally in humans, and the similarities and differences were used to identify both the strengths and inadequacies of the concepts used to form the model. Findings were confirmatory of some concepts but contrary to some which are firmly held in the literature, indicating that understanding the complexity of cardiovascular control probably requires a combination of experiments and computer models which integrate multiple systems and allow for determination of sufficiency and necessity.

Utilization of electrical charges in the pores of tofu waste for hydrogen production in water

2020 ◽  
pp. 124-135
Author(s):  
I. N. G. Wardana ◽  
N. Willy Satrio
Keyword(s):  
Magnetic Field ◽  
Hydrogen Production ◽  
Sodium Bicarbonate ◽  
Positive Charge ◽  
Electrical Energy ◽  
Hydrogen Sensor ◽  
Water Molecules ◽  
Partial Charge ◽  
Delocalized Electron ◽  
Water Hydrogen

Tofu is main food in Indonesia and its waste generally pollutes the waters. This study aims to change the waste into energy by utilizing the electric charge in the pores of tofu waste to produce hydrogen in water. The tofu pore is negatively charged and the surface surrounding the pore has a positive charge. The positive and negative electric charges stretch water molecules that have a partial charge. With the addition of a 12V electrical energy during electrolysis, water breaks down into hydrogen. The test was conducted on pre-treated tofu waste suspension using oxalic acid. The hydrogen concentration was measured by a MQ-8 hydrogen sensor. The result shows that the addition of turmeric together with sodium bicarbonate to tofu waste in water, hydrogen production increased more than four times. This is due to the fact that magnetic field generated by delocalized electron in aromatic ring in turmeric energizes all electrons in the pores of tofu waste, in the sodium bicarbonate, and in water that boosts hydrogen production. At the same time the stronger partial charge in natrium bicarbonate shields the hydrogen proton from strong attraction of tofu pores. These two combined effect are very powerful for larger hydrogen production in water by tofu waste.

Development and Evaluation of a Pt/Ti-FET-Type Hydrogen Sensor

2010 ◽  
Vol 130 (8) ◽  
pp. 407-411
Author(s):  
Masatoshi Kariya ◽  
Kouhei Mizuhara ◽  
Tomiharu Yamaguchi ◽  
Toshihiko Kiwa ◽  
Shinsuke Kunitsugu ◽  
...  
Keyword(s):  
Hydrogen Sensor

Hydrogen Selectivity of a Proton-Pumping Gate FET Hydrogen Sensor in an AC Modulation Mode

2009 ◽  
Vol 129 (4) ◽  
pp. 110-114 ◽  
Author(s):  
Tomiharu Yamaguchi ◽  
Masanori Takisawa ◽  
Toshihiko Kiwa ◽  
Hironobu Yamada ◽  
Keiji Tsukada
Keyword(s):  
Hydrogen Sensor ◽  
Proton Pumping ◽  
Modulation Mode ◽  
Hydrogen Selectivity

Reduction of Wind Disturbance by Optimizing the Drive Current of Pt Ultra-thin Film Hydrogen Sensor

2020 ◽  
Vol 140 (4) ◽  
pp. 92-96
Author(s):  
Yuto Goda ◽  
Hiroto Shobu ◽  
Kenji Sakai ◽  
Toshihiko Kiwa ◽  
Kenji Kondo ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrogen Sensor ◽  
Wind Disturbance ◽  
Drive Current ◽  
Ultra Thin Film

Assessment of Reliability of cap layers used in Cu-Black DiamondTM Interconnects

2003 ◽  
Vol 766 ◽  
Author(s):  
Ahila Krishnamoorthy ◽  
N.Y. Huang ◽  
Shu-Yunn Chong
Keyword(s):  
Dielectric Layer ◽  
Dielectric Breakdown ◽  
Copper Ions ◽  
Dielectric Strength ◽  
Time Dependent ◽  
Breakdown Field ◽  
Field Range ◽  
Time Dependent Dielectric Breakdown ◽  
Voltage Ramp ◽  
Low K

AbstractBlack DiamondTM. (BD) is one of the primary candidates for use in copper-low k integration. Although BD is SiO2 based, it is vastly different from oxide in terms of dielectric strength and reliability. One of the main reliability concerns is the drift of copper ions under electric field to the surrounding dielectric layer and this is evaluated by voltage ramp (V-ramp) and time dependent dielectric breakdown (TDDB). Metal 1 and Metal 2 intralevel comb structures with different metal widths and spaces were chosen for dielectric breakdown studies. Breakdown field of individual test structures were obtained from V-ramp tests in the temperature range of 30 to 150°C. TDDB was performed in the field range 0.5 – 2 MV/cm. From the leakage between combs at the same level (either metal 1 or metal 2) Cu drift through SiC/BD or SiN/BD interface was characterized. It was found that Cu/barrier and barrier/low k interfaces functioned as easy paths for copper drift thereby shorting the lines. Cu/SiC was found to provide a better interface than Cu/SiN.

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