Study on ductile mode machining of single-crystal silicon by mechanical machining
2017 ◽
Vol 113
◽
pp. 1-9
◽
Keyword(s):
2000 ◽
Vol 2000.2
(0)
◽
pp. 189-190
Keyword(s):
2005 ◽
pp. 184-188
◽
Keyword(s):
2011 ◽
Vol 239-242
◽
pp. 3236-3239
◽
Keyword(s):
2007 ◽
Vol 329
◽
pp. 433-438
◽
2005 ◽
Vol 128
(3)
◽
pp. 723-729
◽
2010 ◽
Vol 126-128
◽
pp. 627-632
◽
Keyword(s):
2003 ◽
Vol 69
(12)
◽
pp. 1754-1758
Keyword(s):
1998 ◽
Vol 64
(4)
◽
pp. 608-612
◽
1985 ◽
Vol 43
◽
pp. 300-301