Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations
1996 ◽
2001 ◽
Vol 72
(8)
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pp. 3344-3348
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Keyword(s):
Keyword(s):
2008 ◽
Vol 254
(23)
◽
pp. 7838-7842
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