A Two Magnetron Sputter Deposition Chamber Equipped with an Additional Ion Gun for in situ Observation of Thin Film Growth and Surface Modification by Synchrotron Radiation Scattering
2001 ◽
Vol 72
(8)
◽
pp. 3344-3348
◽
2007 ◽
Vol 253
(23)
◽
pp. 9112-9115
◽
Keyword(s):
1996 ◽
2018 ◽
Vol 89
(12)
◽
pp. 123702
◽
Keyword(s):
Keyword(s):