Lanthanide rare earth oxide thin film as an alternative gate oxide

2017 ◽  
Vol 68 ◽  
pp. 302-315 ◽  
Author(s):  
Kian Heng Goh ◽  
A.S.M.A. Haseeb ◽  
Yew Hoong Wong
Keyword(s):  
Thin Film ◽  
Rare Earth ◽  
Rare Earth Oxide ◽  
Gate Oxide ◽  
Oxide Thin Film

P‐1.3: Novel Top Gate Oxide Thin Film Transistor: With Top Light Shielding Metal Structure

2021 ◽  
Vol 52 (S2) ◽  
pp. 692-692
Author(s):  
Macai Lu ◽  
Nian Liu ◽  
Lu Gao ◽  
Xueru Mei ◽  
Minggang Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Metal Structure ◽  
Gate Oxide ◽  
Oxide Thin Film

Role of Rare Earth Ions in Anodic Gate Dielectrics for Indium-Zinc-Oxide Thin-Film Transistors

2012 ◽  
Vol 159 (5) ◽  
pp. H502-H506 ◽  
Author(s):  
Dongxiang Luo ◽  
Linfeng Lan ◽  
Miao Xu ◽  
Hua Xu ◽  
Min Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Rare Earth ◽  
Thin Film Transistors ◽  
Gate Dielectrics ◽  
Rare Earth Ions ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Indium Zinc Oxide

Self-Aligned Top-Gate Oxide Thin-Film Transistor Formed by Aluminum Reaction Method

2011 ◽  
Vol 50 (9R) ◽  
pp. 096502 ◽  
Author(s):  
Narihiro Morosawa ◽  
Yoshihiro Ohshima ◽  
Mitsuo Morooka ◽  
Toshiaki Arai ◽  
Tatsuya Sasaoka
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Reaction Method

Electrical properties of top-gate oxide thin-film transistors with double-channel layers

2011 ◽  
Vol 326 (1) ◽  
pp. 186-190 ◽  
Author(s):  
Woo-Seok Cheong ◽  
Sung Mook Chung ◽  
Jae-Hun Shin ◽  
Chi-Sun Hwang
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Thin Film Transistors ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Double Channel

Fabrication method for self-aligned bottom-gate oxide thin-film transistors by utilizing backside excimer-laser irradiation through substrate

2013 ◽  
Vol 103 (14) ◽  
pp. 142111 ◽  
Author(s):  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki ◽  
Hiroto Sato ◽  
Yoshiki Nakajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Fabrication Method ◽  
Excimer Laser Irradiation ◽  
Bottom Gate
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