Measurements of an ion beam diameter extracted into air through a glass capillary

2013 ◽  
Vol 315 ◽  
pp. 332-335 ◽  
Author(s):  
Natsuko Fujita ◽  
Atsuko Yamaki ◽  
Kunikazu Ishii ◽  
Hidemi Ogawa
Keyword(s):  
Ion Beam ◽  
Beam Diameter ◽  
Glass Capillary

Optimizing Gas-Assisted Processes for Ga and Xe FIB Circuit Edit Application

2016 ◽  
Author(s):  
Valery Ray ◽  
Josef V. Oboňa ◽  
Sharang Sharang ◽  
Lolita Rotkina ◽  
Eddie Chang ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Structural Damage ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Width ◽  
Ion Source ◽  
Reconstruction Technique ◽  
Beam Diameter ◽  
Current Profile ◽  
Single Beam

Abstract Despite commercial availability of a number of gas-enhanced chemical etches for faster removal of the material, there is still lack of understanding about how to take into account ion implantation and the structural damage by the primary ion beam during focused ion beam gas-assisted etching (FIB GAE). This paper describes the attempt to apply simplified beam reconstruction technique to characterize FIB GAE within single beam width and to evaluate the parameters critical for editing features with the dimensions close to the effective ion beam diameter. The approach is based on reverse-simulation methodology of ion beam current profile reconstruction. Enhancement of silicon dioxide etching with xenon difluoride precursor in xenon FIB with inductively coupled plasma ion source appears to be high and relatively uniform over the cross-section of the xenon beam, making xenon FIB potentially suitable platform for selective removal of materials in circuit edit application.

Charge dissipation and self focusing limit in high current density ion beam transport through a micro glass capillary

2018 ◽  
Vol 52 (5) ◽  
pp. 055205 ◽  
Author(s):  
Sanjeev Kumar Maurya ◽  
Sushanta Barman ◽  
Samit Paul ◽  
Sudeep Bhattacharjee
Keyword(s):  
Current Density ◽  
High Current Density ◽  
Ion Beam ◽  
High Current ◽  
Beam Transport ◽  
Glass Capillary ◽  
Self Focusing

scholarly journals Anodisation of Aluminium Alloys by Micro-Capillary Technique as a Tool for Reliable, Cost-Efficient, and Quick Process Parameter Determination

2016 ◽  
Vol 2016 ◽  
pp. 1-12 ◽  
Author(s):  
Daniela Nickel ◽  
Dagmar Dietrich ◽  
Roy Morgenstern ◽  
Ingolf Scharf ◽  
Harry Podlesak ◽  
...  
Keyword(s):  
Process Parameters ◽  
Cross Sections ◽  
Aluminium Alloys ◽  
Focused Ion Beam ◽  
Corrosion Behaviour ◽  
Film Formation ◽  
Ion Beam ◽  
Parameter Determination ◽  
Pure Aluminium ◽  
Glass Capillary

Anodisation is essential for improving surface properties of aluminium alloys and composites regarding wear and corrosion behaviour. Optimisation of the anodising process depends on microstructural constituents contained in aluminium alloys and represents a key task, consisting of the control of process parameters and electrolyte formulation. We applied the micro-capillary technique known from corrosion studies and modified it to form anodic aluminium oxide films on high-strength aluminium alloys in comparison to pure aluminium in sulphuric acid. A glass capillary with an opening of 800 μm in diameter was utilized. Corresponding electrochemical measurements during potentiodynamic and potentiostatic anodisation revealed anodic current responses similar to conventional anodisation. The measurement of film thickness was adapted to the thin anodised spots using ellipsometry and energy dispersive X-ray analysis. Cross sections prepared by focused ion beam milling confirm the thickness results and show the behaviour of intermetallic phases depending on the anodising potential. Consequently, micro-capillary anodising proved to be an effective tool for developing appropriate anodisation conditions for aluminium alloys and composites because it allows quick variation of electrolyte composition by applying low electrolyte volumes and rapid film formation due to short process durations at small areas and more flexible variation of process parameters due to the used set-up.

Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 4107-4110 ◽  
Author(s):  
Reo Kometani ◽  
Takahiko Morita ◽  
Keiichiro Watanabe ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Nanostructure Fabrication ◽  
Glass Capillary

High-Accuracy Intelligent Complex System by Using Electronic Parallel Datum

2007 ◽  
Author(s):  
Xiang-Wen Xiong ◽  
Bear L. Wynn
Keyword(s):  
Laser Beam ◽  
Control Method ◽  
Ion Beam ◽  
Control Process ◽  
Optical Emission ◽  
Work Piece ◽  
Beam Diameter ◽  
Direct Reading ◽  
Ultra Precision ◽  
Precise Testing

The method of electronic parallel datum is to calculate by a stereo angle between the two beams of light with inclination simulating parameters of an object and successfully replace the 6-DOF mechanical datum of the work piece by being pre-set in the work piece and system. This technique called electronic parallel datum method has high precision for the adoption of Scan & Micro-Staggered method; furthermore, the intelligent direct reading of 6-DOF mechanical datum and parameter storage function of the technique can greatly improve the performance of the system and at the same time offer the process control method and can be used for micro-fabrication and Micro-Manufacturing and general industrial (In particular, it can be used for Ultra precision manufacturing environment, because the diameter of the laser beam can reach 100 nm and ion beam diameter even reached the limit precision of 2nm, and optical emission types, including the ion beam, Universal laser beam and general light beam, which mainly use receiver spacing of nano-array CCD sensors). It is widely used in the intelligent control process and system such as installation and adjustment, and undoubtedly, is to be adopted in many technical fields, general Manufacturing and all general work piece, precise testing process. With the method the system will become more precise, run faster and cost less.

scholarly journals Applications of Microbeams Produced by Tapered Glass Capillary Optics

2020 ◽  
Vol 4 (2) ◽  
pp. 22 ◽  
Author(s):  
Tokihiro Ikeda
Keyword(s):  
Ion Beam ◽  
Transmission Mechanism ◽  
Glass Capillary ◽  
Self Organized ◽  
Transmission Mechanisms ◽  
Beam Analysis ◽  
Capillary Optics ◽  
Cell Surgery ◽  
First Time ◽  
Experimental And Theoretical Studies

Production of ion microbeams using tapered glass capillary optics was introduced more than 10 years ago. This technique has drawn attention in terms of both its peculiar transmission features and application to ion beam analysis. The transmission mechanism based on a self-organized charge-up process for keV-energy ions was observed for the first time in an experiment using a multitude of nanometer-sized capillaries in a polymer foil. The same mechanism can be seen for the transmission of keV ions through a single tapered glass capillary. The transmission experiments with keV ions showed a delayed transmission, focusing effects, guiding effects, and formation of microbeams. Experiments using MeV-energy ions always aim at applications of microbeam irradiation for material analysis, surface modification, cell surgery, and so on. In this article, the applications of MeV ion microbeams, including the fabrication method of the glass capillary, are reviewed, as well as the experimental and theoretical studies for the transmission mechanisms of keV/MeV ions.

Industrial applications of TOF-SIMS imaging

1996 ◽  
Vol 54 ◽  
pp. 1040-1041
Author(s):  
Steven J. Pachuta
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Mass Range ◽  
Chemical Imaging ◽  
Industrial Applications ◽  
Beam Diameter ◽  
Tof Sims ◽  
Initial Penetration

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) has in recent years become a useful tool for surface analysis in industrial laboratories. All elements and isotopes, as well as many molecular entities, can be detected by SIMS, with most of the signal coming from the outer 10 - 20 Å of the surface. The initial penetration of TOF-SIMS into industry was as an improvement over existing quadrupole instruments, with higher mass range, mass resolution, and sensitivity. The coupling of TOF-SIMS with high brightness liquid metal ion sources greatly expanded the applicability of the technique, making chemical imaging of the outermost monolayers of a surface a routine experiment.Several examples will be presented of TOF-SIMS imaging applied to real-world materials encountered in an industrial analytical laboratory. All results were obtained from a PHI-Evans TFS series instrument equipped with an FEI two-lens 69Ga+ liquid metal ion gun (LMIG). When operated at 25 keV beam energy, a primary ion beam diameter of 2500 Å in continuous mode, and 1-2 μm in pulsed mode, can routinely be obtained.

Ion phase-space vortices in 2.5-dimensional simulations

2001 ◽  
Vol 65 (2) ◽  
pp. 107-129 ◽  
Author(s):  
STEINAR BØRVE ◽  
HANS L. PÉCSELI ◽  
JAN TRULSEN
Keyword(s):  
Magnetic Field ◽  
Phase Space ◽  
Ion Beam ◽  
Plasma Boundary ◽  
Space Structures ◽  
Beam Diameter ◽  
Particle In Cell ◽  
Spatial Dimensions ◽  
Cell Simulation ◽  
Transverse Modulation

The formation and propagation of ion phase-space vortices are observed in a numerical particle-in-cell simulation in two spatial dimensions and with three velocity components. The code allows for an externally applied magnetic field. The electrons are assumed to be isothermally Boltzmann-distributed at all times, implying that Poisson's equation becomes nonlinear for the present problem. Ion phase-space vortices are formed by the nonlinear saturation of the ion-ion two-stream instability, excited by injecting an ion beam at the plasma boundary. We consider the effect of a finite beam diameter and a magnetic field, in particular. A vortex instability is observed, appearing as a transverse modulation, which slowly increases with time and ultimately breaks up the vortex. When many vortices are present at the same time, we find that it is their interaction that eventually leads to a gradual filling-up of the phase-space structures. The ion phase-space vortices have a finite lifetime, which is noticeably shorter than that found in one-dimensional simulations. An externally imposed magnetic field can increase this lifetime considerably. For high injected beam velocities in magnetized plasmas, we observe the excitation of electrostatic ion-cyclotron instabilities, but see no associated formation of ion phase-space vortices. The results are relevant, for instance, for the interpretation of observations by instrumented spacecraft in the Earth's ionosphere and magnetosphere.

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