scholarly journals Applications of Microbeams Produced by Tapered Glass Capillary Optics

2020 ◽  
Vol 4 (2) ◽  
pp. 22 ◽  
Author(s):  
Tokihiro Ikeda

Production of ion microbeams using tapered glass capillary optics was introduced more than 10 years ago. This technique has drawn attention in terms of both its peculiar transmission features and application to ion beam analysis. The transmission mechanism based on a self-organized charge-up process for keV-energy ions was observed for the first time in an experiment using a multitude of nanometer-sized capillaries in a polymer foil. The same mechanism can be seen for the transmission of keV ions through a single tapered glass capillary. The transmission experiments with keV ions showed a delayed transmission, focusing effects, guiding effects, and formation of microbeams. Experiments using MeV-energy ions always aim at applications of microbeam irradiation for material analysis, surface modification, cell surgery, and so on. In this article, the applications of MeV ion microbeams, including the fabrication method of the glass capillary, are reviewed, as well as the experimental and theoretical studies for the transmission mechanisms of keV/MeV ions.

2010 ◽  
Vol 638-642 ◽  
pp. 1384-1389 ◽  
Author(s):  
Sven Neve ◽  
Kurt Stiebing ◽  
Lothar P.H. Schmidt ◽  
Hans Eberhard Zschau ◽  
Patrick J. Masset ◽  
...  

Using the halogen effect TiAl-alloys can be protected against high-temperature oxidation. Two different fluorination methods were applied to turbine blades. The mass increase due to oxidation can be drastically reduced compared to untreated specimen. A new vacuum chamber for ion beam analysis was developed to analyze the real parts. Using PIGE-technique the F-content as a function of depth before and after oxidation was detected. Thickness and composition of the oxide scale were measured by RBS. Both ion beam methods were non destructive and thus enabled for the first time quality assurance of the halogen treatment on real components.


1998 ◽  
Vol 513 ◽  
Author(s):  
V. Atluri ◽  
N. Herbots

ABSTRACTSi(100) is H-passivated via a modified pre-RCA cleaning followed by etching in HF:alcohol, to produce ordered (1 × 1) templates which desorb at low temperature (T ≥ 600°C). Four sets of 12 wafers, each set processed identically, are used to test reproducibility, and are characterized by Ion Beam Analysis (IBA), Tapping Mode Atomic Force Microscope (TMAFM), and Fourier Transform Infrared Spectroscopy (FTIR). The absolute coverage of oxygen and carbon is measured by ion channeling combined with nuclear resonance at 3.05 MeV for oxygen and 4.265 MeV for carbon, improving the signal to noise by a factor 10 for oxygen and by 120 for carbon. It is then possible for the first time to measure ordering of oxygen atoms with respect to the surface by comparing the amount of oxygen from rotating random spectra to the disordered oxygen measured by channeling. Hydrogen is measured via the elastic recoil detection (ERD) of 4He2+ at 2.8 MeV.Si(100) etched in HF:methanol after a modified preliminary RCA cleaning yields the cleanest surface. The data suggest that Si(100) passivated by HF in alcohol is terminated by an ordered hydroxide layer, which desorbs at lower temperatures than the more refractory Si02.


2021 ◽  
Author(s):  
M. Salimi ◽  
O. Kakuee ◽  
S. F. Masoudi ◽  
H. R. kheiri ◽  
E. Briand ◽  
...  

Abstract The cross-sections of deuteron-induced nuclear reactions suitable for ion beam analysis, measured in different laboratories, are often significantly different. In the present work, differential cross-sections of 27 Al(d,p) and 27 Al(d,α) reactions were measured, and the cross sections benchmarked with thick target spectra obtained from pure aluminium for the first time in two independent laboratories. The 27 Al(d,p) and (d,alpha) differential cross-sections were measured between 1.4 and 2 MeV at scattering angles of 165°, 150°, and 135° in the VDGT laboratory in Tehran (Iran), and the same measurements for detector angle of 150° were repeated from scratch, including target making, with independent equipment on the SAFIR platform at INSP in Paris (France). The results of these two measurements at 150° are in good agreement, and for the first time a fitted function is proposed to describe the Al-cross sections for which no suitable theoretical expression exists. The obtained differential cross-sections were validated through benchmarking, by fitting with SIMNRA deuteron-induced particle spectra obtained from a high purity bulk Al target at both labs for deuteron incident energies between 1.6 and 2 MeV. The thick target spectra are well-reproduced. The evaluated and benchmarked cross sections have been uploaded to the ion beam analysis nuclear data library database (www-nds.iaea.org/ibandl/).


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
M. Salimi ◽  
O. Kakuee ◽  
S. F. Masoudi ◽  
H. Rafi-kheiri ◽  
E. Briand ◽  
...  

AbstractThe cross-sections of deuteron-induced nuclear reactions suitable for ion beam analysis, measured in different laboratories, are often significantly different. In the present work, differential cross-sections of 27Al(d,p) and 27Al(d,α) reactions were measured, and the cross sections benchmarked with thick target spectra obtained from pure aluminium for the first time in two independent laboratories. The 27Al(d,p) and (d,α) differential cross-sections were measured between 1.4 and 2 MeV at scattering angles of 165°, 150°, and 135° in the VDGT laboratory in Tehran (Iran), and the same measurements for detector angle of 150° were repeated from scratch, including target making, with independent equipment on the SAFIR platform at INSP in Paris (France). The results of these two measurements at 150° are in good agreement, and for the first time a fitted function is proposed to describe the Al-cross sections for which no suitable theoretical expression exists. The obtained differential cross-sections were validated through benchmarking, by fitting with SIMNRA deuteron-induced particle spectra obtained from a high purity bulk Al target at both labs for deuteron incident energies between 1.6 and 2 MeV. The thick target spectra are well-reproduced. The evaluated and benchmarked cross sections have been uploaded to the ion beam analysis nuclear data library database (www-nds.iaea.org/ibandl/).


Author(s):  
H. J. Bender ◽  
R. A. Donaton

Abstract The characteristics of an organic low-k dielectric during investigation by focused ion beam (FIB) are discussed for the different FIB application modes: cross-section imaging, specimen preparation for transmission electron microscopy, and via milling for device modification. It is shown that the material is more stable under the ion beam than under the electron beam in the scanning electron microscope (SEM) or in the transmission electron microscope (TEM). The milling of the material by H2O vapor assistance is strongly enhanced. Also by applying XeF2 etching an enhanced milling rate can be obtained so that both the polymer layer and the intermediate oxides can be etched in a single step.


2019 ◽  
Vol 297 ◽  
pp. 100-110 ◽  
Author(s):  
Nick Lucas ◽  
Kelsey E. Seyfang ◽  
Andrew Plummer ◽  
Michael Cook ◽  
K. Paul Kirkbride ◽  
...  

Instruments ◽  
2021 ◽  
Vol 5 (1) ◽  
pp. 10
Author(s):  
Sören Möller ◽  
Daniel Höschen ◽  
Sina Kurth ◽  
Gerwin Esser ◽  
Albert Hiller ◽  
...  

The analysis of material composition by ion-beam analysis (IBA) is becoming a standard method, similar to electron microscopy. A pool of IBA methods exists, from which the combination of particle-induced-X-ray emission (PIXE), particle induced gamma-ray analysis (PIGE), nuclear-reaction-analysis (NRA), and Rutherford-backscattering-spectrometry (RBS) provides the most complete analysis over the whole periodic table in a single measurement. Yet, for a highly resolved and accurate IBA analysis, a sophisticated technical setup is required integrating the detectors, beam optics, and sample arrangement. A new end-station developed and installed in Forschungszentrum Jülich provides these capabilities in combination with high sample throughput and result accuracy. Mechanical tolerances limit the device accuracy to 3% for RBS. Continuous pumping enables 5*10−8 mbar base pressure with vibration amplitudes < 0.1 µm. The beam optics achieves a demagnification of 24–34, suitable for µ-beam analysis. An in-vacuum manipulator enables scanning 50 × 50 mm² sample areas with 10 nm accuracy. The setup features the above-mentioned IBA detectors, enabling a broad range of analysis applications such as the operando analysis of batteries or the post-mortem analysis of plasma-exposed samples with up to 3000 discrete points per day. Custom apertures and energy resolutions down to 11 keV enable separation of Fe and Cr in RBS. This work presents the technical solutions together with the quantification of these challenges and their success in the form of a technical reference.


2021 ◽  
Vol 11 (14) ◽  
pp. 6575
Author(s):  
Yu Yang ◽  
Adrian Keller

Ion beam irradiation of solid surfaces may result in the self-organized formation of well-defined topographic nanopatterns. Depending on the irradiation conditions and the material properties, isotropic or anisotropic patterns of differently shaped features may be obtained. Most intriguingly, the periodicities of these patterns can be adjusted in the range between less than twenty and several hundred nanometers, which covers the dimensions of many cellular and extracellular features. However, even though ion beam nanopatterning has been studied for several decades and is nowadays widely employed in the fabrication of functional surfaces, it has found its way into the biomaterials field only recently. This review provides a brief overview of the basics of ion beam nanopatterning, emphasizes aspects of particular relevance for biomaterials applications, and summarizes a number of recent studies that investigated the effects of such nanopatterned surfaces on the adsorption of biomolecules and the response of adhering cells. Finally, promising future directions and potential translational challenges are identified.


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