Selective SO2 detection at low concentration by Ca substituted LaFeO3 chemiresistive gas sensor: A comparative study of LaFeO3 pellet vs thin film

Thin-film modules are emerging in the photovoltaic market, due to their competitive cost with the traditional crystalline silicon modules. The thin-film cells CuIn(1-x)Ga(x)Se2 (Copper Indium Gallium Selenide - CIGS) are...

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Comparative study on the effect of annealing temperature on sol–gel-derived nickel oxide thin film as hole transport layers for inverted perovskite solar cells

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-05537-x ◽

2021 ◽

Author(s):

T. Selvan Ponmudi ◽

Ching-Wei Lee ◽

Chien-Chih Lai ◽

Chih-Hung Tsai

Keyword(s):

Thin Film ◽

Solar Cells ◽

Comparative Study ◽

Nickel Oxide ◽

Annealing Temperature ◽

Sol Gel ◽

Perovskite Solar Cells ◽

Hole Transport ◽

Oxide Thin Film ◽

Hole Transport Layers

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Indium tin oxide (ITO) thin film gas sensor for detection of methanol at room temperature

Sensors and Actuators B Chemical ◽

10.1016/s0925-4005(03)00524-0 ◽

2003 ◽

Vol 96 (1-2) ◽

pp. 180-189 ◽

Cited By ~ 197

Author(s):

N.G. Patel ◽

P.D. Patel ◽

V.S. Vaishnav

Keyword(s):

Thin Film ◽

Gas Sensor ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature

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Ozone and nitrogen dioxide gas sensor based on a nanostructured SrTi0.85Fe0.15O3 thin film

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.03.089 ◽

2015 ◽

Vol 638 ◽

pp. 374-379 ◽

Cited By ~ 32

Author(s):

Luís F. da Silva ◽

Valmor R. Mastelaro ◽

Ariadne C. Catto ◽

Carlos A. Escanhoela ◽

Sandrine Bernardini ◽

...

Keyword(s):

Thin Film ◽

Nitrogen Dioxide ◽

Gas Sensor

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A comparative study of different rare-earth (Gd, Nd, and Sm) metals doped ZnO thin films and its room temperature ammonia gas sensor activity: Synthesis, characterization, and investigation on the impact of dopant

Optical Materials ◽

10.1016/j.optmat.2021.111554 ◽

2021 ◽

Vol 121 ◽

pp. 111554

Author(s):

K. Kasirajan ◽

L. Bruno Chandrasekar ◽

S. Maheswari ◽

M. Karunakaran ◽

P. Shunmuga Sundaram

Keyword(s):

Thin Films ◽

Rare Earth ◽

Comparative Study ◽

Gas Sensor ◽

Room Temperature ◽

Zno Thin Films ◽

Ammonia Gas ◽

Doped Zno ◽

The Impact

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NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2011.10.059 ◽

2012 ◽

Vol 161 (1) ◽

pp. 447-452 ◽

Cited By ~ 120

Author(s):

Jing Zeng ◽

Ming Hu ◽

Weidan Wang ◽

Huiqing Chen ◽

Yuxiang Qin

Keyword(s):

Thin Film ◽

Gas Sensor ◽

Sensing Properties

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Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

MRS Proceedings ◽

10.1557/proc-657-ee5.19 ◽

2000 ◽

Vol 657 ◽

Author(s):

Youngman Kim ◽

Sung-Ho Choo

Keyword(s):

Thin Film ◽

Mechanical Properties ◽

Residual Stress ◽

Gas Sensor ◽

Gas Sensors ◽

Micro Gas Sensor ◽

Thin Film Layer ◽

Film Layer ◽

The Difference ◽

Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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