Effect of central gas velocity and plasma power on the spheroidizing copper powders of radio frequency plasma

Vacuum ◽

10.1016/j.vacuum.2020.109195 ◽

2020 ◽

Vol 174 ◽

pp. 109195

Author(s):

Bo Zeng ◽

Jun Wang ◽

Hong-yuan Fan ◽

Hong Chang

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Gas Velocity ◽

Copper Powders ◽

Frequency Plasma

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Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition

Journal of Applied Physics ◽

10.1063/1.4829031 ◽

2013 ◽

Vol 114 (17) ◽

pp. 173511 ◽

Cited By ~ 10

Author(s):

Hyunsoo Jung ◽

Hagyoung Choi ◽

Heeyoung Jeon ◽

Sanghun Lee ◽

Hyeongtag Jeon

Keyword(s):

Atomic Layer Deposition ◽

Radio Frequency ◽

Atomic Layer ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Power Dependence ◽

Remote Plasma ◽

Layer Deposition ◽

Frequency Plasma ◽

Al2o3 Films

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The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.6265 ◽

2012 ◽

Vol 12 (7) ◽

pp. 5494-5499 ◽

Cited By ~ 1

Author(s):

Jaesang Lee ◽

Hyungchul Kim ◽

Taeyong Park ◽

Youngbin Ko ◽

Heeyoung Jeon ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Radio Frequency ◽

Room Temperature ◽

Atomic Layer ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Remote Plasma ◽

Layer Deposition ◽

Frequency Plasma ◽

Al2o3 Films

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Impact of Radio Frequency Plasma Power on the Structure, Crystallinity, Dislocation Density, and the Energy Band Gap of ZnO Nanostructure

ACS Omega ◽

10.1021/acsomega.1c04105 ◽

2021 ◽

Author(s):

Ahmed F. Abdulrahman ◽

Azeez A. Barzinjy ◽

Samir M. Hamad ◽

Munirah Abdullah Almessiere

Keyword(s):

Dislocation Density ◽

Radio Frequency ◽

Band Gap ◽

Energy Band ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Energy Band Gap ◽

Zno Nanostructure ◽

Frequency Plasma

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The effect of oxygen flow rate and radio frequency plasma power on cubic ZnMgO ultraviolet sensors grown by plasma-enhanced molecular beam epitaxy

Applied Physics Letters ◽

10.1063/1.4815995 ◽

2013 ◽

Vol 103 (3) ◽

pp. 031114 ◽

Cited By ~ 10

Author(s):

R. Casey Boutwell ◽

Ming Wei ◽

Winston V. Schoenfeld

Keyword(s):

Molecular Beam Epitaxy ◽

Radio Frequency ◽

Flow Rate ◽

Molecular Beam ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Frequency Plasma ◽

Effect Of Oxygen

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Optical Properties of Organic Light Emitting Diode and Characteristics of ITO by Variation of Radio Frequency Plasma Power

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2009.22.1.081 ◽

2009 ◽

Vol 22 (1) ◽

pp. 81-85

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Light Emitting Diode ◽

Radio Frequency Plasma ◽

Plasma Power ◽

Light Emitting ◽

Organic Light Emitting Diode ◽

Organic Light ◽

Frequency Plasma

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Dually driven radio frequency plasma simulation with a three moment model

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581324 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2162-2172 ◽

Cited By ~ 33

Author(s):

Heon Chang Kim ◽

Vasilios I. Manousiouthakis

Keyword(s):

Radio Frequency ◽

Plasma Simulation ◽

Radio Frequency Plasma ◽

Frequency Plasma

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Modification of a Fur Semi-finished Sheepskins by Radio Frequency Plasma in an Inert Gas Medium

Journal of Physics Conference Series ◽

10.1088/1742-6596/1923/1/012020 ◽

2021 ◽

Vol 1923 (1) ◽

pp. 012020

Author(s):

E A Pankova ◽

F S Sharifullin ◽

G R Rakhmatullina ◽

R R Shagivalieva ◽

V S Zheltukhin

Keyword(s):

Radio Frequency ◽

Inert Gas ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Gas Medium

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Spatial variations of radio frequency plasma density caused by a step‐change of secondary electron emission coefficient

Journal of Applied Physics ◽

10.1063/1.359452 ◽

1995 ◽

Vol 77 (9) ◽

pp. 4293-4301 ◽

Cited By ~ 4

Author(s):

Weilu Xu ◽

Paul J. Sides

Keyword(s):

Radio Frequency ◽

Plasma Density ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Step Change ◽

Radio Frequency Plasma ◽

Emission Coefficient ◽

Secondary Electron Emission Coefficient ◽

Frequency Plasma

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Design and operation of a rotating drum radio frequency plasma reactor for the modification of free nanoparticles

Review of Scientific Instruments ◽

10.1063/1.4811138 ◽

2013 ◽

Vol 84 (6) ◽

pp. 063904 ◽

Cited By ~ 7

Author(s):

Jeffrey C. Shearer ◽

Ellen R. Fisher

Keyword(s):

Radio Frequency ◽

Plasma Reactor ◽

Radio Frequency Plasma ◽

Rotating Drum ◽

Frequency Plasma

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Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Physics of Plasmas ◽

10.1063/1.4893148 ◽

2014 ◽

Vol 21 (8) ◽

pp. 083509 ◽

Cited By ~ 15

Author(s):

B. Bora ◽

L. Soto

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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