The effect of substrate bias in amorphous carbon films prepared by magnetron sputtering and monitored by in-situ spectroscopic ellipsometry
1998 ◽
Vol 7
(2-5)
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pp. 444-448
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Keyword(s):
2006 ◽
Vol 45
(3-4)
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pp. 190-195
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Keyword(s):
Keyword(s):
1999 ◽
Vol 16
(7)
◽
pp. 1044
2010 ◽
Vol 256
(22)
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pp. 6506-6511
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Keyword(s):
2000 ◽
Vol 18
(5)
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pp. 2344
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