Ion Thinning of Electron Transparent Single Crystal Sapphire Substrates

1974 ◽  
Vol 32 ◽  
pp. 468-469
Author(s):  
J. L. Kenty ◽  
R. E. Johnson
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Sapphire Substrates ◽  
Single Crystal Sapphire ◽  
Growth Experiments

Samples of single crystal sapphire (α-Al2O3) have been ion-beam thinned to yield electron transparent regions suitable for use as substrates for in situ thin film growth experiments. Routine fabrication of 1 mm dia. samples containing one or more thin (∼200Å) regions ∼10μm2 in area was possible. The samples were surprisingly robust, many surviving post-thinning subdivision, mounting into a TEM environment cell, and heating to ∼1200°C.

scholarly journals Atmosphere influence on in-situ ion beam analysis of thin film growth

1994 ◽  
Vol 253 (1-2) ◽  
pp. 247-253 ◽  
Author(s):  
Yuping Lin ◽  
Alan R. Krauss ◽  
Robert P.H. Chang ◽  
Orlando H. Auciello ◽  
Dieter M. Gruen ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Ion Beam Analysis ◽  
Beam Analysis

scholarly journals Studies of thin‐film growth, adsorption, and oxidation by in situ, real‐time, and ex situ ion beam analysis

1994 ◽  
Vol 12 (4) ◽  
pp. 1557-1564 ◽  
Author(s):  
Yuping Lin ◽  
A. R. Krauss ◽  
O. Auciello ◽  
Y. Nishino ◽  
D. M. Gruen ◽  
...  
Keyword(s):  
Thin Film ◽  
Real Time ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Ex Situ ◽  
Ion Beam Analysis ◽  
Beam Analysis

Atomically controlled surfaces with step and terrace of β-Ga2O3 single crystal substrates for thin film growth

2008 ◽  
Vol 254 (23) ◽  
pp. 7838-7842 ◽  
Author(s):  
Shigeo Ohira ◽  
Naoki Arai ◽  
Takayoshi Oshima ◽  
Shizuo Fujita
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Film Growth ◽  
Thin Film Growth

In situ work function study of oxidation and thin film growth on clean surfaces

1999 ◽  
Vol 433-435 ◽  
pp. 770-774 ◽  
Author(s):  
I.D Baikie ◽  
U Petermann ◽  
B Lägel
Keyword(s):  
Thin Film ◽  
Work Function ◽  
Film Growth ◽  
Thin Film Growth ◽  
Function Study
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