Some HREM observations on silicon small particles
In recent years, small particles have attracted the attentions of by some researchers for their physical and chemical anomaly as well as technological application to ceramics and catalyst industries. For these studies, morphological investigations on small particles seem to be important. HREM methods are the most direct approach to obtain particle crystal structures at atomic level resolution. This talk reviews some of the works on small particle research that have been done as a part of the fine particle research project by Japanese Research development Corporation (fully government-supported project). Among the many TEM observations on small particles that have been done, some specific problems using Si particles are presented.Small particle production Small particles of Si were prepared by a gasevaporation method which utilizes the evaporation and condensation of Si vapors in an Ar gas at 300Torr. The Si vapors were obtained by heating Si rods by an arc discharge1.