SEM evaluation of the TEM cold-stage double-film specimen

1984 ◽  
Vol 42 ◽  
pp. 272-273
Author(s):  
Jayesh Bellare
Keyword(s):  
Spatial Distribution ◽  
Sample Preparation ◽  
Sample Thickness ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Liquid Sample ◽  
Thin Specimen ◽  
Sample Preparation Technique ◽  
Cold Stage ◽  
Film Specimen

Seeing is believing, but only after the sample preparation technique has received a systematic study and a full record is made of the treatment the sample gets.For microstructured liquids and suspensions, fast-freeze thermal fixation and cold-stage microscopy is perhaps the least artifact-laden technique. In the double-film specimen preparation technique, a layer of liquid sample is trapped between 100- and 400-mesh polymer (polyimide, PI) coated grids. Blotting against filter paper drains excess liquid and provides a thin specimen, which is fast-frozen by plunging into liquid nitrogen. This frozen sandwich (Fig. 1) is mounted in a cooling holder and viewed in TEM.Though extremely promising for visualization of liquid microstructures, this double-film technique suffers from a) ireproducibility and nonuniformity of sample thickness, b) low yield of imageable grid squares and c) nonuniform spatial distribution of particulates, which results in fewer being imaged.

A Technique for Preparing “Two in One” Cross-Sectional TEM Specimens

1990 ◽  
Vol 199 ◽  
Author(s):  
Guang-Hwa M. Ma ◽  
Sopa Chevacharoenkul
Keyword(s):  
Sample Preparation ◽  
The Other ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Preparation Time ◽  
Cross Sectional ◽  
Sample Preparation Technique ◽  
Two Samples ◽  
Junction Formation ◽  
Suitable Marker

ABSTRACTA modified “two-in-one” cross-sectional TEM sample preparation technique is described. By coating a thin layer of “marker” to distinguish one sample from the other, two samples could be simultaneously prepared in one TEM cross-sectional specimen. Therefore, the specimen preparation time is reduced by nearly one half. The coating can be done in an existing ion-mill. Criteria for choosing a suitable marker as well as tips on getting good quality specimens are described. An example of applying this technique to a processing-microstructure study of an ultra-shallow junction formation in silicon is demonstrated.

Preparation of Vitrified TEM Samples for the Direct Observation of Sol and Gel Structures

1987 ◽  
Vol 115 ◽  
Author(s):  
Joseph K. Bailey ◽  
Jayesh R. Bellare ◽  
Martha L. Mecartney
Keyword(s):  
Liquid Phase ◽  
Sample Preparation ◽  
Cooling Rate ◽  
Radiation Damage ◽  
Direct Observation ◽  
Preparation Technique ◽  
Liquid Sample ◽  
Sample Preparation Technique ◽  
Beam Heating ◽  
Evolution Of Structure

ABSTRACTDirect observation of structure in liquid phase materials is made possible by a cryo-vitrification technique in which a thin liquid sample is frozen at a high cooling rate to prevent crystallization. We have applied this technique to observe the evolution of structure in ceramic sols and gels using TEM. The sample preparation technique is described in detail and results obtained from colloidal and polymeric sols and gels are presented to show the usefulness of the technique. Artifacts arising from radiation damage and beam heating are also discussed.

Methodology for TEM Analysis of Barrier Profiles

2002 ◽  
Author(s):  
Tan-Chen Lee ◽  
Jui-Yen Huang ◽  
Li-Chien Chen ◽  
Ruey-Lian Hwang ◽  
David Su
Keyword(s):  
Sample Preparation ◽  
Profile Analysis ◽  
Image Interpretation ◽  
Sample Thickness ◽  
Image Resolution ◽  
Specimen Preparation ◽  
Tem Analysis ◽  
Preparation Methods ◽  
High Image Resolution ◽  
Common Technique

Abstract Device shrinkage has resulted in thinner barriers and smaller vias. Transmission Electron Microscopy (TEM) has become a common technique for barrier profile analysis because of its high image resolution. TEM sample preparation and image interpretation becomes difficult when the size of the small cylindrical via is close to the TEM sample thickness. Effects of different sample thickness and specimen preparation methods, therefore, have been investigated. An automatic FIB program has been shown to be useful in via sample preparation. Techniques for imaging a TEM specimen will be discussed in the paper. Conventional TEM bright field (BF) image is adequate to examine the barrieronly via; however, other techniques are more suitable for a Cu filled via.

Introduction of a Novel Sample Preparation Technique for the Failure Analysis of Silicon Integrated Photonics Modules

2019 ◽  
Author(s):  
Pradip Sairam Pichumani ◽  
Fauzia Khatkhatay
Keyword(s):  
Sample Preparation ◽  
Failure Analysis ◽  
Silicon Photonics ◽  
Cmos Technology ◽  
Single Step ◽  
Oxide Semiconductor ◽  
Disruptive Technology ◽  
Preparation Technique ◽  
Test Vehicle ◽  
Sample Preparation Technique

Abstract Silicon photonics is a disruptive technology that aims for monolithic integration of photonic devices onto the complementary metal-oxide-semiconductor (CMOS) technology platform to enable low-cost high-volume manufacturing. Since the technology is still in the research and development phase, failure analysis plays an important role in determining the root cause of failures seen in test vehicle silicon photonics modules. The fragile nature of the test vehicle modules warrants the development of new sample preparation methods to facilitate subsequent non-destructive and destructive analysis methods. This work provides an example of a single step sample preparation technique that will reduce the turnaround time while simultaneously increasing the scope of analysis techniques.

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