AlOx Thin Films Synthesized by Mist Chemical Vapor Deposition, Monitored by a Fast-Scanning Mobility Particle Analyzer, and Applied as a Gate Insulating Layer in the Field-Effect Transistors
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2017 ◽
Vol 27
(13)
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pp. 1606469
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1999 ◽
Vol 38
(Part 2, No. 10A)
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pp. L1099-L1101
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2020 ◽
Vol 67
(4)
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pp. 1839-1844
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1993 ◽
Vol 11
(3)
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pp. 1176
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