Novel Physical Vapor Deposition Approach to Hybrid Perovskites: Growth of MAPbI3 Thin Films by RF-Magnetron Sputtering

This work compares the piezoresistive properties of SiC thin films produced by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering. In order to study these properties, strain gauges based on SiC films produced were fabricated using photolithography techniques in conjunction with lift-off processes. The beam-bending method was used to characterize the SiC strain gauges fabricated.

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Biocompatibility and antibacterial properties of TiCu(Ag) thin films produced by physical vapor deposition magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2021.151604 ◽

2021 ◽

pp. 151604

Author(s):

Saqib Rashid ◽

Gian Marco Vita ◽

Luca Persichetti ◽

Giovanna Iucci ◽

Chiara Battocchio ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Antibacterial Properties

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Vapor Deposition of Thin-Film Y-Doped ZrO2 For Electrochemical Device Applications

MRS Proceedings ◽

10.1557/proc-369-623 ◽

1994 ◽

Vol 369 ◽

Cited By ~ 1

Author(s):

Brandon W. Chung ◽

Eric L. Brosha ◽

David R. Brown ◽

Fernando H. Garzon

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Impedance Analysis ◽

Rf Magnetron Sputtering ◽

Polycrystalline Thin Films ◽

Single Target ◽

Ac Impedance Analysis ◽

Device Applications ◽

Separation Devices

AbstractThe growth of high-quality, pin-hole free, ytrrium doped ZrO2 thin films is of great interest for a variety of electrochemical applications such as fuel cells and oxygen gas separation devices. In the work, we have grown polycrystalline thin films of ytrrium doped ZrO2 on thick porous Al2O3 substrates in multilayer La1-xSrxMEO3/YSZ/La1-xSrxMEO3 (ME = Mn, Co) configurations using a combination of single-target RF magnetron sputtering and electron beam physical vapor deposition techniques. The structure and morphology of these films have been studied using X-ray diffraction, and Scanning Electron Microscopy techniques. The ionic conductivity of the thin films has been measured using AC impedance analysis.

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Magnetron Sputtering for Low-temperature Deposition of CdTe-based Photovoltaics

MRS Proceedings ◽

10.1557/proc-763-b3.7 ◽

2003 ◽

Vol 763 ◽

Cited By ~ 2

Author(s):

Alvin D. Compaan

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

High Efficiency ◽

Chemical Vapor ◽

Rf Magnetron Sputtering ◽

Polycrystalline Thin Film ◽

Thin Film Semiconductors ◽

Temperature Deposition

AbstractAlthough the deposition over large areas of polycrystalline thin-film semiconductors such as CdTe is possible by a variety of methods including close spaced sublimation, vapor transport deposition, physical vapor deposition, organometallic chemical vapor deposition, and electrodeposition, the use of a plasma-based method such as magnetron sputtering can have significant advantages. In this paper I review recent results from our group in the fabrication of CdS/CdTe cells using rf magnetron sputtering and discuss some of the advantages that appear possible from the use of sputtering methods in this class of materials. Some of these advantages are particularly relevant as the polycrystalline thin-film community address issues related to the challenges of fabricating high efficiency tandem cells with efficiencies over 25%. Recently we have achieved: improvements in sputtered cell performance with cells based on commercial SnO2:F as well as on substrates with our own sputtered ZnO:Al, progress in the use of reactive sputtering for the deposition of oxygen alloys of CdS and N-doped layers of ZnTe, and progress in the sputtering of wider and narrower bandgap alloys of CdTe with Zn, Mn, and Hg. Details of the sputtering process and some of the recent achievements are discussed below.

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Titanium and titanium nitride thin films grown by dc reactive magnetron sputtering Physical Vapor Deposition in a continuous mode on stainless steel wires: Chemical, morphological and structural investigations

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2017.05.089 ◽

2017 ◽

Vol 324 ◽

pp. 318-327 ◽

Cited By ~ 25

Author(s):

S. Grosso ◽

L. Latu-Romain ◽

G. Berthomé ◽

G. Renou ◽

T. Le Coz ◽

...

Keyword(s):

Thin Films ◽

Stainless Steel ◽

Magnetron Sputtering ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Reactive Magnetron ◽

Continuous Mode ◽

Structural Investigations ◽

Steel Wires ◽

Dc Reactive Magnetron Sputtering

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Biocompatibility and Antibacterial Properties of TiCu(Ag) Thin Films Produced by Physical Vapor Deposition Magnetron Sputtering

10.20944/preprints202106.0601.v1 ◽

2021 ◽

Author(s):

Saqib Rashid ◽

Gian Marco Vita ◽

Luca Persichetti ◽

Giovanna Iucci ◽

Chiara Battocchio ◽

...

Keyword(s):

Thin Films ◽

Tissue Engineering ◽

Magnetron Sputtering ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Human Fibroblasts ◽

Engineering Applications ◽

X Ray ◽

Structural And Functional Properties ◽

Bactericidal Properties

Mechanical robustness, biocompatibility, and antibacterial performances are key features for materials suitable to be used in tissue engineering applications. In this work, we investigated the link existing between structural and functional properties of TiCu(Ag) thin films deposited by physical vapor deposition magnetron sputtering on Si substrates. The thin films were characterized by X-ray diffraction (XRD), nanoindentation, atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The TiCu(Ag) thin films showed complete amorphous structure and improved mechanical properties in comparison with pure Ti films. However, for contents in excess of 20% Ag, we observed the appearance of nanometric Ag crystallite. The TiCu(Ag) thin films displayed excellent biocompatibility properties, allowing adhesion and proliferation of the human fibroblasts MRC-5 cell line. Moreover, all the investigated TiCu(Ag) alloy display bactericidal properties, preventing the growth of both Pseudomonas aeruginosa and Staphylococcus aureus. Results obtained from biological tests have been correlated to the surface structure and microstructure of films. The excellent biocompatibility and bactericidal properties of these multifunctional thin films opens to their use in tissue engineering applications.

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