He plus remote plasma nitridation of ultra-thin gate oxide for deep submicron CMOS technology applications

2001 ◽  
Vol 37 (12) ◽  
pp. 788 ◽  
Author(s):  
Shyh-Fann Ting ◽  
Yean-Kuen Fang ◽  
Chien-Hao Chen ◽  
Chih-Wei Yang ◽  
Mo-Chiun Yu ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Cmos Technology ◽  
Deep Submicron ◽  
Remote Plasma ◽  
Plasma Nitridation ◽  
Technology Applications ◽  
Submicron Cmos ◽  
Thin Gate Oxide

Effect of the pre-gate oxide cleaning temperature on the reliability of GOI and devices performances in deep submicron CMOS technology

2008 ◽  
Vol 48 (11-12) ◽  
pp. 1786-1790 ◽  
Author(s):  
Y.T. Chiang ◽  
Y.K. Fang ◽  
Y.J. Huang ◽  
T.H. Chou ◽  
S.Y. Yeh ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Cmos Technology ◽  
Deep Submicron ◽  
Submicron Cmos

Deep Submicron CMOS Technology Using Top-Edge Round STI and Dual Gate Oxide for Low Power 256 M-Bit Mobile DRAM

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 1892-1896 ◽  
Author(s):  
Chihoon Lee ◽  
Donggun Park ◽  
Namhyuk Jo ◽  
Chanseong Hwang ◽  
Hyeong Joon Kim ◽  
...  
Keyword(s):  
Low Power ◽  
Gate Oxide ◽  
Cmos Technology ◽  
Deep Submicron ◽  
Dual Gate ◽  
Submicron Cmos

Novel Nitrogen Profile Control Technology in Ultra Thin Gate Oxide for Deep Submicron CMOS

2000 ◽  
Author(s):  
T. Ogura ◽  
H. Kotaki ◽  
S. Kakimoto ◽  
S. Zaima ◽  
Y. Yasuda
Keyword(s):  
Gate Oxide ◽  
Deep Submicron ◽  
Control Technology ◽  
Profile Control ◽  
Submicron Cmos ◽  
Thin Gate Oxide

Impact of decoupled plasma nitridation of ultra-thin gate oxide on the performance of p-channel MOSFETs

2002 ◽  
Vol 17 (6) ◽  
pp. L25-L28 ◽  
Author(s):  
Chun Meng Lek ◽  
Byung Jin Cho ◽  
Chew Hoe Ang ◽  
Shyue Seng Tan ◽  
Wei Yip Loh ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Plasma Nitridation ◽  
Thin Gate Oxide
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