Nitrogen plasma annealing for low temperature Ta2O5 films
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2021 ◽
Vol 93
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pp. 423-429
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2007 ◽
Vol 154
(6)
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pp. H512
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2013 ◽
Vol 49
(4)
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pp. 1020-1026
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2017 ◽
Vol 29
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pp. 775-784
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