Highly conductive and wide band gap amorphous‐microcrystalline mixed‐phase silicon films prepared by photochemical vapor deposition

1985 ◽  
Vol 58 (4) ◽  
pp. 1427-1431 ◽  
Author(s):  
Shoji Nishida ◽  
Hirohisa Tasaki ◽  
Makoto Konagai ◽  
Kiyoshi Takahashi
1993 ◽  
Vol 297 ◽  
Author(s):  
M.J. Williams ◽  
S.M. Cho ◽  
G. Lucovsky

We have investigated a-Si,N:H alloys as an alternative wide band-gap, photo-active material. The entire alloy range between a-Si:H and a-Si3N4:H can be formed by a remote plasma-enhanced chemical-vapor deposition (PECVD) process. Other studies have demonstrated that a-Si,N:H alloys could be doped to form window materials for p-i-n devices. This paper focuses on alloy materials with E04 bandgaps to about 2.2 eV. We have prepared these a-Si,N:H alloys, characterized their microstructure, and studied their photoconductivity, sensitivity to light-soaking and transport properties. For example, with increased alloying we show that i) the white-light photoconductivity and ii) the kinetics and magnitude of the decay of photoconducitivity under intense illumination (the Staebler-Wronski effect), are about the same as for PV-grade a-Si:H.


2014 ◽  
Vol 386 ◽  
pp. 190-193 ◽  
Author(s):  
Takayoshi Oshima ◽  
Mifuyu Niwa ◽  
Akira Mukai ◽  
Tomohito Nagami ◽  
Toshihisa Suyama ◽  
...  

1996 ◽  
Vol 420 ◽  
Author(s):  
R. Martins ◽  
A. Macarico ◽  
I. Ferreira ◽  
R. Nunes ◽  
A. Bicho ◽  
...  

AbstractWide band gap microcrystalline silicon films have aroused considerable interest since they combine some electro-optical advantages of amorphous and crystalline materials highly important to produce electro-optical devices such as TFTs and solar cells. In this paper we present results concerning the electro-optical characteristics of highly transparent and conductive n-type µc-Si based films. Here, emphasis is given to the production of n-type ýtc-films with optical gaps of 2.3 eV and dark conductivity's of 6.5 Scm-1


1985 ◽  
Vol 49 ◽  
Author(s):  
S. Nishida ◽  
H. Tasaki ◽  
M. Konagai ◽  
K. Takahashi

AbstractDoped hydrogenated microcrystalline silicon (μc-Si:H) and fluorinated hydrogenated microcrystalline (μc-Si:F:H) films were prepared by the mercury photosensitized decomposition of a disilane-hydrogen or a difluorosilane-hydrogen gas mixture, respectively. The maximum dark conductivity and optical band gap of μc-Si:H films were respectively 20 S•cm−1 and ∼2.0 eV for n-type and 1 S•cm−1 and 2.3 eV for p-type. A higher dark conductivity as much as 50 S•cm−1 and a wide gap of 2.0 eV were obtained for n-type μc-Si:F:H. It is most significant that the gaseous ratio of hydrogen to disilane should be enhanced to obtain such a highly conductive and wide gap film. The crystallinity of the photo-deposited μc-Si:H films appeared to be improved in comparison with that of films by the conventional plasma glow discharge technique.


2001 ◽  
Vol 184 (1) ◽  
pp. 179-186 ◽  
Author(s):  
N. Barreau ◽  
S. Marsillac ◽  
J.C. Bern�de ◽  
T. Ben Nasrallah ◽  
S. Belgacem

2016 ◽  
Vol 183 ◽  
pp. 315-317 ◽  
Author(s):  
Amit Pawbake ◽  
Ravindra Waykar ◽  
Ashok Jadhavar ◽  
Rupali Kulkarni ◽  
Vaishali Waman ◽  
...  

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