Stacking faults created by the combined deflection of threading dislocations of Burgers vector c and c+a during the physical vapor transport growth of 4H–SiC

2011 ◽  
Vol 98 (23) ◽  
pp. 232110 ◽  
Author(s):  
M. Dudley ◽  
F. Wu ◽  
H. Wang ◽  
S. Byrappa ◽  
B. Raghothamachar ◽  
...  
2011 ◽  
Vol 679-680 ◽  
pp. 269-272 ◽  
Author(s):  
Michael Dudley ◽  
Huan Huan Wang ◽  
Fang Zhen Wu ◽  
Sha Yan Byrapa ◽  
Balaji Raghothamachar ◽  
...  

Synchrotron White Beam X-ray Topography studies are presented of dislocation behavior and interactions in a new generation of seventy-six millimeter diameter, 4H-SiC wafers grown using Physical Vapor Transport under specially designed low stress conditions. Such low stress growth conditions have enabled reductions of dislocation density by two or three orders of magnitude compared to the lowest previously reported levels [1]. In this paper, detailed topography analysis will be presented of the deflection of threading dislocations with Burgers vectors of c and c+a onto the basal plane leading to reductions of the density of such dislocations down to levels of ~187 cm-2. The deflection of the latter type of dislocations produces complex faulted defect configurations and models for their creation are presented and discussed.


1996 ◽  
Vol 423 ◽  
Author(s):  
Jennifer Giocondi ◽  
Gregory S. Rohrer ◽  
Marek Skowronski ◽  
V. Balakrishna ◽  
G. Augustine ◽  
...  

AbstractThe growth surface of a 6H-SiC boule, grown by physical vapor transport, was examined using scanning force microscopy. The dimensions of surface/micropipe intersections and screw dislocation Burgers vectors have been determined from topographic data. All micropipes are positioned along the lines of super screw dislocations with a Burgers vectors of at least 4 times the c-axis repeat distance (15.2 Å). Perfect c-axis screw dislocations with Burgers vectors of only 15.2 Å are stable and do not have open cores. Measurements show that micropipe core radii, determined indirectly from the width of the craters formed at the surface/micropipe intersections, increase with the square of the dislocation Burgers vector.


2008 ◽  
Vol 600-603 ◽  
pp. 67-70 ◽  
Author(s):  
Alkyoni Mantzari ◽  
Frédéric Mercier ◽  
Maher Soueidan ◽  
Didier Chaussende ◽  
Gabriel Ferro ◽  
...  

The aim of the present work is to study the structural properties of 3C-SiC which is grown on (0001) 6H-SiC and on (100) 3C-SiC (Hoya) seeds using the Continuous Feed Physical Vapor Transport (CF-PVT) method. Transmission Electron Microscopy (TEM) observations confirm that the overgrown layer is of the 3C-SiC polytype. In the case of the 6H-SiC substrate, microtwins (MTs), stacking faults (SFs) and dislocations (D) are observed at the substrate-overgrown interface with most of the dislocations annihilating within the first few µm from the interface. In the case of 3C-SiC crystals grown on 3C seeds, repeated SFs are formed locally and also coherent (111) twins of 3C-SiC are frequently observed near the surface. The SF density is reduced at the uppermost part of the grown material.


2012 ◽  
Vol 717-720 ◽  
pp. 1287-1290 ◽  
Author(s):  
Balaji Raghothamachar ◽  
Rafael Dalmau ◽  
Baxter Moody ◽  
H. Spalding Craft ◽  
Raoul Schlesser ◽  
...  

Using the physical vapor transport (PVT) method, single crystal boules of AlN have been grown and wafers sliced from them have been characterized by synchrotron white beam X-ray topography (SWBXT) in conjunction with optical microscopy. X-ray topographs reveal that the wafers contain dislocations that are inhomogeneously distributed with densities varying from as low as 0 cm-2 to as high as 104 cm-2. Two types of dislocations have been identified: basal plane dislocations and threading dislocations, both having Burgers vectors of type 1/3<112-0> indicating that their origin is likely due to post-growth deformation. In some cases, the dislocations are arranged in low angle grain boundaries. However, large areas of the wafers are nearly dislocation-free and section X-ray topographs of these regions reveal the high crystalline perfection.


2014 ◽  
Vol 1693 ◽  
Author(s):  
Fangzhen Wu ◽  
Huanhuan Wang ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
Stephan G. Mueller ◽  
...  

ABSTRACTIn our previous studies [1-3], four kinds of stacking faults in 4H-SiC bulk crystal have been distinguished based on their contrast behavior differences in synchrotron white beam x-ray topography images. These faults are Shockley faults, Frank faults, Shockley plus c/2 Frank faults, and Shockley plus c/4 Frank faults. Our proposed formation mechanisms for these stacking faults involve the overgrowth of the surface outcrop associated with threading screw dislocations (TSDs) or threading mixed dislocations (TMDs) with Burgers vector of c+a by macrosteps and the consequent deflection of TSDs or TMDs onto the basal plane. Previous synchrotron x-ray topography observations were made in offcut basal wafers using transmission geometry. In this paper, further evidence is reported to confirm the proposed stacking fault formation mechanism. Observations are made in axially cut slices with surface plane {11-20}. Several kinds of stacking faults are recognized and their contrast behavior agrees with the four kinds previously reported. Direct observation is obtained of a Shockley plus c/4 Frank stacking fault nucleating from a TMD deflected onto the basal plane. The contrast from stacking faults on the basal plane in the axial slices is enhanced by recording images after rotating the crystal about the active -1010 reflection vector enabling a broader projection of the basal plane.


2012 ◽  
Vol 717-720 ◽  
pp. 347-350 ◽  
Author(s):  
Sha Yan Byrapa ◽  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Balaji Raghothamachar ◽  
Gloria Choi ◽  
...  

A review is presented of Synchrotron White Beam X-ray Topography (SWBXT) studies of stacking faults observed in PVT-Grown 4H-SiC crystals. A detailed analysis of various interesting phenomena were performed and one such observation is the deflection of threading dislocations with Burgers vector c/c+a onto the basal plane and associated stacking faults. Based on the model involving macrostep overgrowth of surface outcrops of threading dislocations, SWBXT image contrast studies of these stacking faults on different reflections and comparison with calculated phase shits for postulated fault vectors, has revealed faults to be of basically four types: (a) Frank faults; (b) Shockley faults; (c) Combined Shockley + Frank faults with fault vector s+c/2; (d) Combined Shockley + Frank faults with fault vector s+c/4.


2012 ◽  
Vol 717-720 ◽  
pp. 343-346 ◽  
Author(s):  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Sha Yan Byrapa ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
...  

Synchrotron White Beam X-ray Topography (SWBXT) imaging of wafers cut parallel to the growth axis from 4H-SiC boules grown using Physical Vapor Transport has enabled visualization of the evolution of the defect microstructure. Here we present observations of the propagation and post-growth mutual interaction of threading growth dislocations with c-component of Burgers vector. Detailed contrast extinction studies reveal the presence of two types of such dislocations: pure c-axis screw dislocations and those with Burgers Vector n1c+n2a, where n1is equal to 1 and n2is equal to 1 or 2. In addition, observations of dislocation propagation show that some of the threading dislocations with c-component of Burgers adopt a curved, slightly helical morphology which can drive the dislocations from adjacent nucleation sites together enabling them to respond to the inter-dislocation forces and react. Since all of the dislocations exhibiting such helical configurations have significant screw component, and in view of the fact that such dislocations are typically not observed to glide, it is believed that such morphologies result in large part from the interaction of a non-equilibrium concentration of vacancies with the originally approximately straight dislocation cores during post-growth cooling. Such interactions can lead to complete or partial Burgers vector annihilation. Among the reactions observed are: (a) the reaction between opposite-sign threading screw dislocations with Burgers vectors c and –c wherein some segments annihilate leaving others in the form of trails of stranded loops comprising closed dislocation dipoles; (b) the reaction between threading dislocations with Burgers vectors of -c+a and c+a wherein the opposite c-components annihilate leaving behind the two a-components; (c) the similar reaction between threading dislocations with Burgers vectors of -c and c+a leaving behind the a-component.


1996 ◽  
Vol 442 ◽  
Author(s):  
E. K. Sanchez ◽  
M. De Graef ◽  
W. Qian ◽  
M. Skowronski

AbstractThe interface between 6H and 15R polytypes of silicon carbide, grown by Physical Vapor Transport, was studied by high-resolution transmission electron microscopy. The sample was investigated in cross-section cut perpendicular to the [11.0] irection. The atomic stacking sequence at the interface of the polytypes was determined. Polytype boundaries with orientations parallel and perpendicular to the 6H c-axis were investigated. Stacking faults associated with low angle grain boundaries in both 6H and 15R regions were observed and the 15R regions systematically showed a higher fault density than the 6H regions.


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