Design and use of compact lensed fibers for low cost packaging of optical MEMS components

Optical microelectromechanical systems (MEMS) combine miniature optical components with precision fixtures, elastic suspensions, and microactuators, and allow complex functionality at low cost. However, the effect of the bounded nature of the beams propagating through the system on design is profound. The current paper reviews the fundamental consequences. Using a Gaussian beam formulation, models of guided modes in gradient index media, bounded beams and imaging components are constructed. Propagation algorithms are described. The alignment tolerances for common component trains such as fibre-to-fibre and beam-to-fibre connections are derived, limits on the curvature of reflecting surfaces are established, the scaling laws of free-space optical MEMS are presented and the effect of beam size on filter performance is clarified. Examples such as variable optical attenuators, optical cross-connect switches, filters and tunable lasers are discussed.

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Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces

Optical and Quantum Electronics ◽

10.1007/s11082-021-02846-7 ◽

2021 ◽

Vol 53 (5) ◽

Author(s):

Muhammad Rizwan Amirzada ◽

Qingdang Li ◽

Hartmut Hillmer

Keyword(s):

Optical Transmission ◽

Near Infrared ◽

Low Cost ◽

Flexible Substrate ◽

Research Work ◽

Polyethylene Naphthalate ◽

Optical Mems ◽

Glass Substrates ◽

Technological Data ◽

Micromirror Arrays

AbstractThis research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.

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Low-cost, widespread and reproducible mold fabrication technique for PDMS-based microfluidic photonic systems

Photonics Letters of Poland ◽

10.4302/plp.v12i1.981 ◽

2020 ◽

Vol 12 (1) ◽

pp. 22

Author(s):

Szymon Baczyński ◽

Piotr Sobotka ◽

Kasper Marchlewicz ◽

Artur Dybko ◽

Katarzyna Rutkowska

Keyword(s):

Low Cost ◽

Lab On A Chip ◽

Microfluidic Devices ◽

Optical Quality ◽

Microfluidic Channels ◽

Nanosecond Laser ◽

Microfluidic Systems ◽

Optical Mems ◽

Technical Data ◽

Mold Fabrication

In this letter the possibility of low-cost fabrication of molds for PDMS-based photonic microstructures is considered. For this purpose, three different commercially available techniques, namely UV-curing of the capillary film, 3D SLA printing and micromilling, have been analyzed. Obtained results have been compared in terms of prototyping time, quality, repeatability, and re-use of the mold for PDMS-based microstructures fabrication. Prospective use for photonic systems, especially optofluidic ones infiltrated with liquid crystalline materials, have been commented. Full Text: PDF References:K. Sangamesh, C.T. Laurencin, M. Deng, Natural and Synthetic Biomedical Polymers (Elsevier, Amsterdam 2004). [DirectLink]A. Mata et. al, "Characterization of Polydimethylsiloxane (PDMS) Properties for Biomedical Micro/Nanosystems", Biomed. Microdev. 7(4), 281 (2005). [CrossRef]I. Rodríguez-Ruiz et al., "Photonic Lab-on-a-Chip: Integration of Optical Spectroscopy in Microfluidic Systems", Anal. Chem. 88(13), 6630 (2016). [CrossRef]SYLGARD™ 184 Silicone Elastomer, Technical Data Sheet [DirectLink]N.E. Stankova et al., "Optical properties of polydimethylsiloxane (PDMS) during nanosecond laser processing", Appl. Surface Science 374, 96 (2016) [CrossRef]J.C. McDonald et al., "Fabrication of microfluidic systems in poly(dimethylsiloxane)", Electrophoresis 21(1), 27 (2000). [CrossRef]T. Fujii, "PDMS-based microfluidic devices for biomedical applications", Microelectronic Eng. 61, 907 (2002). [CrossRef]F. Schneider et al., "Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS", Sensors Actuat. A: Physical 151(2), 95 (2009). [CrossRef]T.K. Shih et al., "Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding", Microelectronic Eng. 83(11-12), 2499 (2006). [CrossRef]K. Rutkowska et al. "Electrical tuning of the LC:PDMS channels", PLP, 9, 48-50 (2017). [CrossRef]D. Kalinowska et al., "Studies on effectiveness of PTT on 3D tumor model under microfluidic conditions using aptamer-modified nanoshells", Biosensors Bioelectr. 126, 214 (2019).[CrossRef]N. Bhattacharjee et al., "The upcoming 3D-printing revolution in microfluidics", Lab on a Chip 16(10), 1720 (2016). [CrossRef]I.R.G. Ogilvie et al., "Reduction of surface roughness for optical quality microfluidic devices in PMMA and COC", J. Micromech. Microeng. 20(6), 065016 (2010). [CrossRef]D. Gomez et al., "Femtosecond laser ablation for microfluidics", Opt. Eng. 44(5), 051105 (2005). [CrossRef]Y. Hwang, R.N. Candler, "Non-planar PDMS microfluidic channels and actuators: a review", Lab on a Chip 17(23), 3948 (2017). [CrossRef]

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Fabrication and Characterization of Gallium Nitride Unimorphs for Optical MEMS Applications

ASME 2011 Conference on Smart Materials, Adaptive Structures and Intelligent Systems, Volume 1 ◽

10.1115/smasis2011-5213 ◽

2011 ◽

Author(s):

Prashanth Ramesh ◽

Gregory N. Washington ◽

Sriram Krishnamoorthy ◽

Siddharth Rajan

Keyword(s):

Gallium Nitride ◽

Low Cost ◽

Material Structure ◽

Electromechanical Properties ◽

Device Structure ◽

Optical Mems ◽

3 Dimensional ◽

Active Research ◽

Made In

The research outlined in this paper describes part of a larger effort to develop a novel branch of next-generation materials systems called Distributed Intelligent Materials Systems (DIMS) which incorporate actuation, sensing, electronics and communications modules as inherent parts of the material structure. Newer semiconductor materials that are under active research in the field of microelectronics are very well suited for such material systems. Gallium Nitride (GaN), a smart material, is pursued as a candidate material for such a system with a piezoelectrically actuated, optical microswitch being developed as the first prototypical device. This paper covers the unique electromechanical properties of GaN highlighting its differences from other piezoelectrics, the device configuration used to realize the switching device, followed by a description of and the progress made in using a nascent fabrication technology (PhotoElectroChemical Etching) used to realize the 3-dimensional device structure. Finally a low-cost, laser-based, non-contact approach to testing and characterizing the microscale device is described.

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Decomposition of the metastable beta titanium alloy Ti-15-3

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100075117 ◽

1983 ◽

Vol 41 ◽

pp. 264-265

Author(s):

Y. L. Chen ◽

S. Fujlshiro

Keyword(s):

Low Cost ◽

High Strength ◽

Alpha Phase ◽

Thick Sheet ◽

Omega Phase ◽

Beta Titanium Alloy ◽

Beta Titanium ◽

Beta Matrix ◽

Metastable Beta ◽

Very High

Metastable beta titanium alloys have been known to have numerous advantages such as cold formability, high strength, good fracture resistance, deep hardenability, and cost effectiveness. Very high strength is obtainable by precipitation of the hexagonal alpha phase in a bcc beta matrix in these alloys. Precipitation hardening in the metastable beta alloys may also result from the formation of transition phases such as omega phase. Ti-15-3 (Ti-15V- 3Cr-3Al-3Sn) has been developed recently by TIMET and USAF for low cost sheet metal applications. The purpose of the present study was to examine the aging characteristics in this alloy.The composition of the as-received material is: 14.7 V, 3.14 Cr, 3.05 Al, 2.26 Sn, and 0.145 Fe. The beta transus temperature as determined by optical metallographic method was about 770°C. Specimen coupons were prepared from a mill-annealed 1.2 mm thick sheet, and solution treated at 827°C for 2 hr in argon, then water quenched. Aging was also done in argon at temperatures ranging from 316 to 616°C for various times.

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Chromic Acid Etching of Polyethylene

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100070801 ◽

1973 ◽

Vol 31 ◽

pp. 72-73

Author(s):

J. D. Muzzy ◽

R. D. Hester ◽

J. L. Hubbard

Keyword(s):

Chromic Acid ◽

Low Cost ◽

Acid Etching ◽

Crystalline Morphology ◽

Bulk Specimen ◽

Morphological Studies ◽

Perfect Form ◽

Molecular Length ◽

Lamellar Texture ◽

Cost Studies

Polyethylene is one of the most important plastics produced today because of its good physical properties, ease of fabrication and low cost. Studies to improve the properties of polyethylene are leading to an understanding of its crystalline morphology. Polyethylene crystallized by evaporation from dilute solutions consists of thin crystals called lamellae. The polyethylene molecules are parallel to the thickness of the lamellae and are folded since the thickness of the lamellae is much less than the molecular length. This lamellar texture persists in less perfect form in polyethylene crystallized from the melt.Morphological studies of melt crystallized polyethylene have been limited due to the difficulty of isolating the microstructure from the bulk specimen without destroying or deforming it.

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Glass Knife Geometry as Seen by the SEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100066322 ◽

1971 ◽

Vol 29 ◽

pp. 454-455

Author(s):

J. Temple Black

Keyword(s):

Low Cost ◽

Amorphous Material ◽

Stress Concentrations ◽

Basic Tool ◽

Tool Materials ◽

Optical Inspection ◽

Surface Flaws ◽

Slip Planes ◽

Glass Knife ◽

Diamond Knife

In ultramicrotomy, the two basic tool materials are glass and diamond. Glass because of its low cost and ease of manufacture of the knife itself is still widely used despite the superiority of diamond knives in many applications. Both kinds of knives produce plastic deformation in the microtomed section due to the nature of the cutting process and microscopic chips in the edge of the knife. Because glass has no well defined slip planes in its structure (it's an amorphous material), it is very strong and essentially never fails in compression. However, surface flaws produce stress concentrations which reduce the strength of glass to 10,000 to 20,000 psi from its theoretical or flaw free values of 1 to 2 million psi. While the microchips in the edge of the glass or diamond knife are generally too small to be observed in the SEM, the second common type of defect can be identified. This is the striations (also termed the check marks or feathers) which are always present over the entire edge of a glass knife regardless of whether or not they are visable under optical inspection. These steps in the cutting edge can be observed in the SEM by proper preparation of carefully broken knives and orientation of the knife, with respect to the scanning beam.

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Spectraplot: A PC-based spectrum translation and display program

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010010665x ◽

1988 ◽

Vol 46 ◽

pp. 918-919

Author(s):

H. O. Colijn

Keyword(s):

Low Cost ◽

Transfer Program ◽

File Transfer ◽

Transfer Data ◽

Error Checking ◽

Data Files ◽

The University

Many labs today wish to transfer data between their EDS systems and their existing PCs and minicomputers. Our lab has implemented SpectraPlot, a low- cost PC-based system to allow offline examination and plotting of spectra. We adopted this system in order to make more efficient use of our microscopes and EDS consoles, to provide hardcopy output for an older EDS system, and to allow students to access their data after leaving the university.As shown in Fig. 1, we have three EDS systems (one of which is located in another building) which can store data on 8 inch RT-11 floppy disks. We transfer data from these systems to a DEC MINC computer using “SneakerNet”, which consists of putting on a pair of sneakers and running down the hall. We then use the Hermit file transfer program to download the data files with error checking from the MINC to the PC.

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