A specimen preparation technique for plane-view studies of surfaces using transmission electron microscopy

2009 ◽  
Vol 59 (1) ◽  
pp. 27-31 ◽  
Author(s):  
S. Foss ◽  
J. Tafto ◽  
R. Haakenaasen
Author(s):  
K. Doong ◽  
J.-M. Fu ◽  
Y.-C. Huang

Abstract The specimen preparation technique using focused ion beam (FIB) to generate cross-sectional transmission electron microscopy (XTEM) samples of chemical vapor deposition (CVD) of Tungsten-plug (W-plug) and Tungsten Silicides (WSix) was studied. Using the combination method including two axes tilting[l], gas enhanced focused ion beam milling[2] and sacrificial metal coating on both sides of electron transmission membrane[3], it was possible to prepare a sample with minimal thickness (less than 1000 A) to get high spatial resolution in TEM observation. Based on this novel thinning technique, some applications such as XTEM observation of W-plug with different aspect ratio (I - 6), and the grain structure of CVD W-plug and CVD WSix were done. Also the problems and artifacts of XTEM sample preparation of high Z-factor material such as CVD W-plug and CVD WSix were given and the ways to avoid or minimize them were suggested.


Author(s):  
K. Fortunati ◽  
M. Fendorf ◽  
M. Powers ◽  
C.P. Burmester ◽  
R. Gronsky

Transmission electron microscopy, in particular high-resolution TEM, is proving to be a valuable tool in the continuing effort to characterize and understand the “high-Tc” superconducting oxides. Since specimen quality is of critical importance in high-resolution studies, care must be taken to choose the most appropriate specimen preparation technique for the material under study. The BiCaSrCuO material investigated here was in the form of small, sintered pellets with a porous microstructure which consists of small, randomly oriented, poorly connected, plate-like grains (see Figure 1). We have found that this morphology can significantly effect the production of suitable TEM specimens.The simplest and most rapid specimen preparation method employed consists of crushing a small amount of the starting material to a fine powder in an agate mortar and suspending the powder in pure ethanol or propanol. An eye dropper or syringe is then used to transfer 4-6 drops of the suspension onto a holey carbon film supported on a mesh grid, thus effectively dispersing the powder across the grid. A strong tendency for the crystal to cleave along (001) planes, due to the weak bonding between BiO layers, results in flake-like particles which exhibit a preferred [001] orientation on the grid. A high-resolution image of a specimen prepared using this method is shown in Figure 2. We have observed that some specimens produced in this manner are unstable under a 200kV beam (with LaB6 filament), with heavy damage occurring within the time that a through-focus series of micrographs can be exposed. It is also important to note that since separation along grain boundaries occurs during crushing, this method is not an appropriate choice for imaging grain boundary structures.


2004 ◽  
Vol 12 (2) ◽  
pp. 38-41 ◽  
Author(s):  
Mark Hudson ◽  
John Benedict ◽  
Philip Flaitz

One of the methods of preparing samples for analysis by Transmission Electron Microscopy (TEM) is the well-known procedure using a Tripod polisher and the wedge technique (1-3), developed in our laboratory. Though developed explicitly for preparing samples of integrated circuit structures built on silicon, the technique has been used in our lab for a wide variety of other materials, including metals and ceramics. In general when working with silicon samples, we have the luxury of starting with large wafer pieces or chips that are generally at least a couple of millimeters square or larger. Recently, however, we needed to work for an extended period on GaAs based lasers, where the devices requiring analysis were individual lasers extracted from individual packages. These small samples, measuring 100x100x50 microns, are too small for the manual handling involved in routine mechanical cross sectioning methods.


Author(s):  
R. W. Anderson ◽  
D. L. Senecal

A problem was presented to observe the packing densities of deposits of sub-micron corrosion product particles. The deposits were 5-100 mils thick and had formed on the inside surfaces of 3/8 inch diameter Zircaloy-2 heat exchanger tubes. The particles were iron oxides deposited from flowing water and consequently were only weakly bonded. Particular care was required during handling to preserve the original formations of the deposits. The specimen preparation method described below allowed direct observation of cross sections of the deposit layers by transmission electron microscopy.The specimens were short sections of the tubes (about 3 inches long) that were carefully cut from the systems. The insides of the tube sections were first coated with a thin layer of a fluid epoxy resin by dipping. This coating served to impregnate the deposit layer as well as to protect the layer if subsequent handling were required.


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