Self-powered flexible pressure sensors based on nanopatterned polymer films

Sensor Review ◽  
2020 ◽  
Vol 40 (6) ◽  
pp. 629-635
Author(s):  
Man Zhang ◽  
Liangping Xia ◽  
Suihu Dang ◽  
Lifang Shi ◽  
Axiu Cao ◽  
...  

Purpose The pressure sensors can convert external pressure or mechanical deformation into electrical power and signal, which cannot only detect pressure or strain changes but also harvest energy as a self-powered sensor. This study aims to develop a self-powered flexible pressure sensor based on regular nanopatterned polymer films. Design/methodology/approach In this paper, the self-powered flexible pressure sensor is mainly composed of two nanopatterned polymer films and one conductive electrode layer between them, which is a sandwich structure. The regular nanostructures increase the film roughness and contact area to enhance the friction effect. To enhance the performance of the pressure sensor, different nanostructures on soft polymer sensitive layers are fabricated using UV nanoimprint lithography to generate more triboelectric charges. Findings Finally, the self-powered flexible pressure sensor is prepared, which consists of sub-200 nm resolution regular nanostructures on the surface of the elastic layer and an indium tin oxide electrode thin film. By converting the friction mechanical energy into electrical power, a maximum power of 423.8 mW/m2 and the sensitivity of 0.8 V/kPa at a frequency of 5 Hz are obtained, which proves the excellent sensing performance of the sensor. Originality/value The acquired electrical power and pressure signal by the sensor would be processed in the signal process circuit, which is capable of immediately and sustainably driving the highly integrated self-powered sensor system. Results of the experiments show that this new pressure sensor is a potential method for personal pressure monitoring, featured as being wearable, cost-effective, non-invasive and user-friendly.

Sensor Review ◽  
2016 ◽  
Vol 36 (4) ◽  
pp. 397-404 ◽  
Author(s):  
Jianli Cui ◽  
Junping Duan ◽  
Binzhen Zhang ◽  
Xueli Nan

Purpose This paper aims to provide a fabrication and measurement of a highly stretchable pressure sensor with a “V-type” array microelectrode on a grating PDMS substrate. Design/methodology/approach First, the “V-type” array structure on the silicon wafer was fabricated by the MEMS technology, and the fabrication process included ultra-violet lithography and silicon etching. The “V-type” array structure on the master mold was then replicated into polycarbonate, which served as an intermediate, negative mold, using a conventional nanoimprint lithography technique. The negative mold was subsequently used in the PDMS molding process to produce PDMS “V-type” array structures with the same structures as the master mold. An Ag film was coated on the PDMS “V-type” array structure surface by the magnetron sputtering process to obtain PDMS “V-type” array microelectrodes. Finally, a PDMS prepolymer was prepared using a Sylgard184 curing agent with a weight ratio of a 20:1 and applied to the cavity at the middle of the two-layer PDMS “V-type” array microelectrode template to complete hot-press bonding, and a pressure sensor was realized. Findings The experimental results showed that the PDMS “V-type” array microelectrode has high stretchability of 65 per cent, temperature stability of 0.0248, humidity stability of 0.000204, bending stability and cycle stability. Capacitive pressure sensors with a “V-type” array microelectrode exhibit ideal initial capacitance (111.45 pF), good pressure sensitivity of 0.1143 MPa-1 (0-0.35 Mpa), fast response and relaxation times (<200 ms), high bending stability, high temperature/humidity stability and high cycle stability. Originality/value The PDMS “V-type” array structure microelectrode can be used to fabricate pressure sensors and is highly flexible, crack-free and durable.


Author(s):  
Chao Chen ◽  
Yu Shing Chan ◽  
Li Zou ◽  
Wei-Hsin Liao

Dampers are the parts of suspensions which improve the ride comfort and the safety of vehicles including motorcycles. Magnetorheological dampers are very attractive for motorcycle suspensions, because of their controllable properties and their fast responses. Considerable energy is wasted owing to the energy dissipation by dampers encountering road irregularities and accelerating processes during everyday use of motorcycles. In addition, the current magnetorheological suspension systems depend on the power supply of batteries. Therefore, in this paper, a self-powered magnetorheological damper for motorcycle suspensions is proposed and implemented for the first time. It can convert the wasted mechanical energy into useful electrical energy to power itself. There are great merits in this such as energy saving, independence of extra batteries and less maintenance in comparison with conventional magnetorheological suspension systems, while keeping controllable performances. A customized prototype of the self-powered magnetorheological damper that is compatible with a motorcycle is developed and actually implemented in a motorcycle. Modelling for the self-powered magnetorheological damper is developed and validated by laboratory testing. Laboratory testing showed that the self-powered feature works well to generate the electrical power and to vary the magnetorheological damping force. Preliminary system-level testing showed that a self-powered magnetorheological suspension results in a better ride comfort, compared with that of a magnetorheological suspension without power generation. The results showed that implementing self-powered magnetorheological dampers in motorcycle suspensions is feasible and beneficial.


Sensor Review ◽  
2015 ◽  
Vol 35 (1) ◽  
pp. 85-97 ◽  
Author(s):  
C.L. Yang ◽  
A. Mohammed ◽  
Y Mohamadou ◽  
T. I. Oh ◽  
M. Soleimani

Purpose – The aim of this paper is to introduce and to evaluate the performance of a multiple frequency complex impedance reconstruction for fabric-based EIT pressure sensor. Pressure mapping is an important and challenging area of modern sensing technology. It has many applications in areas such as artificial skins in Robotics and pressure monitoring on soft tissue in biomechanics. Fabric-based sensors are being developed in conjunction with electrical impedance tomography (EIT) for pressure mapping imaging. This is potentially a very cost-effective pressure mapping imaging solution in particular for imaging large areas. Fabric-based EIT pressure sensors aim to provide a pressure mapping image using current carrying and voltage sensing electrodes attached on the boundary of the fabric patch. Design/methodology/approach – Recently, promising results are being achieved in conductivity imaging for these sensors. However, the fabric structure presents capacitive behaviour that could also be exploited for pressure mapping imaging. Complex impedance reconstructions with multiple frequencies are implemented to observe both conductivity and permittivity changes due to the pressure applied to the fabric sensor. Findings – Experimental studies on detecting changes of complex impedance on fabric-based sensor are performed. First, electrical impedance spectroscopy on a fabric-based sensor is performed. Secondly, the complex impedance tomography is carried out on fabric and compared with traditional EIT tank phantoms. Quantitative image quality measures are used to evaluate the performance of a fabric-based sensor at various frequencies and against the tank phantom. Originality/value – The paper demonstrates for the first time the useful information on pressure mapping imaging from the permittivity component of fabric EIT. Multiple frequency EIT reconstruction reveals spectral behaviour of the fabric-based EIT, which opens up new opportunities in exploration of these sensors.


2017 ◽  
Vol 69 (4) ◽  
pp. 591-597
Author(s):  
Chaoran Liu ◽  
Yufeng Su ◽  
Jinzhao Yue ◽  
Junjie Wang ◽  
Weiwei Xia ◽  
...  

Purpose A self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston. Design/methodology/approach The self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies. Findings The simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston. Originality/value The self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration.


Sensor Review ◽  
2018 ◽  
Vol 38 (2) ◽  
pp. 248-258
Author(s):  
Gobi K. ◽  
Kannapiran B. ◽  
Devaraj D. ◽  
Valarmathi K.

Purpose The conventional strain gauge type pressure sensor suffers in static testing of engines due to the contact transduction method. This paper aims to focus on the concept of non-contact transduction-based pressure sensor using eddy current displacement sensing coil (ECDS) to overcome the temperature limitations of the strain gauge type pressure sensor. This paper includes the fabrication of prototypes of the proposed pressure sensor and its performance evaluation by static calibration. The fabricated pressure sensor is proposed to measure pressure in static test environment for a short period in the order of few seconds. The limitations of the fabricated pressure sensor related to temperature problems are highlighted and the suitable design changes are recommended to aid the future design. Design/methodology/approach The design of ECDS-based pressure sensor is aimed to provide non-contact transduction to overcome the limitations of the strain gauge type of pressure sensor. The ECDS is designed and fabricated with two configurations to measure deflection of the diaphragm corresponding to the applied pressure. The fabricated ECDS is calibrated using a standard micro meter to ensure transduction within limits. The fabricated prototypes of pressure sensors are calibrated using dead weight tester, and the calibration results are analyzed to select the best configuration. The proposed pressure sensor is tested at different temperatures, and the test results are analyzed to provide recommendations to overcome the shortcomings. Findings The performance of the different configurations of the pressure sensor using ECDS is evaluated using the calibration data. The analysis of the calibration results indicates that the pressure sensor using ECDS (coil-B) with the diaphragm as target is the best configuration. The accuracy of the fabricated pressure sensor with best configuration is ±2.8 per cent and the full scale (FS) output is 3.8 KHz. The designed non-contact transduction method extends the operating temperature of the pressure sensor up to 150°C with the specified accuracy for the short period. Originality/value Most studies of eddy current sensing coil focus on the displacement and position measurement but not on the pressure measurement. This paper is concerned with the design of the pressure sensor using ECDS to realize the non-contact transduction to overcome the limitations of strain gauge type pressure sensors and evaluation of the fabricated prototypes. It is shown that the accuracy of the proposed pressure sensor is not affected by the high temperature for the short period due to non-contact transduction using ECDS.


Sensor Review ◽  
2020 ◽  
Vol 40 (5) ◽  
pp. 529-534
Author(s):  
Igor S. Nadezhdin ◽  
Aleksey G. Goryunov

Purpose Differential pressure is an important technological parameter, one urgent task of which is control and measurement. To date, the lion’s share of research in this area has focused on the development and improvement of differential pressure sensors. The purpose of this paper is to develop a smart differential pressure sensor with improved operational and metrological characteristics. Design/methodology/approach The operating principle of the developed pressure sensor is based on the capacitive measurement principle. The measuring unit of the developed pressure sensor is based on a differential capacitive sensitive element. Programmable system-on-chip (PSoC) technology has been used to develop the electronics unit. Findings The use of a differential capacitive sensitive element allows the unit to compensate for the influence of interference (for example, temperature) on the measurement result. With the use of PSoC technology, it is also possible to increase the noise immunity of the developed smart differential pressure sensor and provide an unparalleled combination of flexibility and integration of analog and digital functionality. Originality/value The use of PSoC technology in the developed smart differential pressure sensor has many indisputable advantages, as the size of the entire circuit can be minimized. As a result, the circuit has improved noise immunity. Accordingly, the procedure for debugging and changing the software of the electronics unit is simplified. These features make development and manufacturing cost effective.


Sensor Review ◽  
2016 ◽  
Vol 36 (4) ◽  
pp. 405-413 ◽  
Author(s):  
Semih Dalgin ◽  
Ahmet Özgür Dogru

Purpose The purpose of this study is to investigate the effect of internal and external factors on the accuracy and consistency of the data provided by mobile-embedded micro-electromechanical system (MEMS) pressure sensors based on smartphones currently in use. Design/methodology/approach For this purpose, sensor type and smartphone model have been regarded as internal factors, whereas temperature, location and usage habits have been considered as external factors. These factors have been investigated by examining data sets provided by sensors from 14 different smartphones. In this context, internal factors have been analyzed by implementing accuracy assessment processes for three different smartphone models, whereas external factors have been evaluated by analyzing the line charts which present timely pressure changes. Findings The study outlined that the sensor data at different sources have different characteristics due to the affecting parameters. Even if the pressure sensors are used under similar circumstances, data of these sensors have inconsistencies because of the sensor drift originated by internal factors. This study concluded that it was not applicable to provide a common correction coefficient for pressure sensor data of each smartphone model. Therefore, relative data (pressure differences) should be taken into consideration rather than absolute data (pressure values) when developing mobile applications using sensor data. Research limitations/implications Results of this study can be used as the guideline for developing mobile applications using MEMS pressure sensors. One of the main finding of this paper is promoting the use of relative data (pressure differences) rather than absolute data (pressure values) when developing mobile applications using smartphone-embedded sensor data. This significant result was proved by examinations applied with in the study and can be applied by future research studies. Originality/value Existing studies mostly evaluate the use of MEMS pressure sensor data obtained from limited number of smartphone models. As each smartphone model has a specific technology, factors affecting the sensor performances should be identified and analyzed precisely in terms of smartphone models for providing extensive results. In this study, five smartphone models were used fractionally. In this context, they were used for examining the common effects of the factors, and detailed accuracy assessments were applied by using two high-tech smartphones in the market.


2019 ◽  
Vol 7 (4) ◽  
pp. 1022-1027 ◽  
Author(s):  
Tongkuai Li ◽  
Longlong Chen ◽  
Xiang Yang ◽  
Xin Chen ◽  
Zhihan Zhang ◽  
...  

High-performance pressure sensors have attracted considerable attention recently due to their promising applications in touch displays, wearable electronics, human–machine interfaces, and real-time physiological signal perception.


2020 ◽  
Vol 2 (2) ◽  
pp. 746-754 ◽  
Author(s):  
Venkateswaran Vivekananthan ◽  
Arunkumar Chandrasekhar ◽  
Nagamalleswara Rao Alluri ◽  
Yuvasree Purusothaman ◽  
Sang-Jae Kim

A water proof silicone elastomer based triboelectric nanogenerator for bio-mechanical energy scavenging and a zero-power consuming/self-powered pressure sensor.


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