Modeling of cumulative thermo-mechanical stress (CTMS) produced by the shallow trench isolation process for 1 Gb DRAM and beyond
1998 ◽
2019 ◽
Vol 100-101
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pp. 113424
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Keyword(s):
2012 ◽
Vol 52
(9-10)
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pp. 1949-1952
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Keyword(s):
2011 ◽
Vol 50
(4S)
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pp. 04DC21
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2011 ◽
Vol 88
(6)
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pp. 882-887
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2008 ◽
Vol 55
(6)
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pp. 1558-1562
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