Development of high pressure sensors using PZT-based thick films

Author(s):  
D. Crescini ◽  
D. Marioli ◽  
A. Taroni ◽  
M. Romani
Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.


1990 ◽  
Vol 112 (4) ◽  
pp. 277-284
Author(s):  
O. Hembise ◽  
P. Guevel ◽  
P. R. Bardey ◽  
J. L. Viaud ◽  
J. Y. Boisson ◽  
...  

This article describes a disposable, sensor-filled ballistic penetrator for in-situ measurements during and after penetration into the clayey sediments of the seabed at depths of about 6000 m. The project involved work on several theoretical and experimental aspects of hydrodynamics: penetrator shape optimization, course stability, precision of point of impact. In addition, measurement and data acquisition techniques were developed using high-pressure sensors, and the dynamics of soil penetration and hole-closing were studied. The project led to the implementation of instrument-carrying devices weighing two tonnes, which, by penetrating some 40 m into the clay at impact speeds of the order of 55 m/s, provided valuable information on the physical characteristics of the seabed soils.


2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.


2017 ◽  
Vol 15 (4) ◽  
pp. 28-39
Author(s):  
A. Tanev ◽  
P. Mitsev ◽  
T. Lazarova

Abstract This paper presents novel green automotive platinum sensing technology together with pressure sensors design principles and applications. In recent years, worldwide emissions legislation has been introduced and is rapidly becoming more stringent. With alternative vehicular propulsion methods far from becoming mainstream reality, leading automotive providers have intensified efforts in the direction of reducing the harmful footprint of their products. This is being accomplished via smaller, appropriately designed internal combustion engines, necessitating an increased and higher-performance sensor content per vehicle. This paper elaborates on temperature sensor application in automotive exhaust gas performance sensing and as well as pressure sensors in different challenging automotive applications with very high pressure levels.


2021 ◽  
Vol 31 (12) ◽  
pp. 124002
Author(s):  
Jie Yu ◽  
Yulan Lu ◽  
Deyong Chen ◽  
Junbo Wang ◽  
Jian Chen ◽  
...  

Abstract High-pressure sensors enable expansive demands in ocean sciences, industrial controls, and oil explorations. Successful sensor realized in piezoresistive high-pressure sensors which suffer from the key issue of compromised accuracies due to serious temperature drifts. Herein, this paper presents a high accuracy resonant high-pressure sensor with the pressure range of 70 MPa. Different from conventional resonant high-pressure sensor, the developed sensor utilized a dual-resonator-cavity design to minimize temperature disturbances and improve the pressure sensitivities. Besides, four circle cavities were used to maintain a high vacuum level for resonators after anodic bonding process. In details, Dual resonators, which is parallelly placed in the tensile and compressive stresses areas of a rectangular pressure sensitive diaphragm, are separated vacuum-packaged in the parallel dual cavities. Thus, pressure under measurement bends the pressure sensitive diaphragm, producing an increased pressure sensitivity and a decreased temperature sensitivity by the differential outputs of the dual resonators. Parameterized mathematical models of the sensor were established and the parameters of the models were optimized to adjust the pressure sensitivities and the temperature sensitivities of the sensor. Simplified deep reactive ion etching was used to form the sensing structure of the sensor and only once anodic bonding was used to form vacuum packaging for the dual resonators. Experimental results confirmed that the Q values of the resonators were higher than 32 000. Besides, the temperature sensitivity of the sensor was reduced from 44 Hz °C−1 (494 ppm °C−1) to 1 Hz °C−1 (11 ppm °C−1) by the differential outputs of the dual resonators in the temperature range of −10 °C–60 °C under the pressure of 1000 kPa. In addition, the accuracy of the sensor was better than 0.02% FS within the pressure range of 110–6500 kPa and the temperature range of −10 °C–60 °C by using a polynomial algorithm.


Author(s):  
Yanli Wang ◽  
Zhili Feng ◽  
Fei Ren ◽  
Yong Chae Lim ◽  
Jian Chen ◽  
...  

A novel Steel Concrete Composite Vessel (SCCV) was designed and engineered for stationary high-pressure gaseous hydrogen storage applications. SCCV comprises four major innovations: (1) flexible modular design for storage stations for scalability to meet different storage pressure and capacity needs, flexibility for cost optimization, and system reliability and safety, (2) composite storage vessel design and construction with an inner steel vessel encased in a pre-stressed and reinforced outer concrete shellshell, (3) layered steel vessel wall and vent holes to address the hydrogen embrittlement (HE) problem by design, and (4) integrated sensor system to monitor the structural integrity and operation status of the storage system. Together, these innovations form an integrated approach to make the SCCV cost competitive and inherently safe for stationary high-pressure hydrogen storage services. A demonstration SCCV has been designed and fabricated to demonstrate its technical feasibility. Capable of storing approximately 89 kg of gaseous hydrogen at 6250 psi (430 bar), the demonstration vessel was designed to include all major features of SCCV design and fabricated with today’s manufacturing technologies and code/standard requirements. Two crucial tests have been performed on this demonstration vessel. A hydro-test was successfully carried out to 8950 psi per ASME VIII-2 requirements. The cyclic hydrogen pressure test between 2000 psi and 6000 psi is currently being performed to validate its use for high-pressure hydrogen storage. Multiple sensors, such as pressure sensors and strain gages, were incorporated in the demonstration SCCV to collect information to validate the design and operation of SCCV. Key design parameters and test data on its performance are summarized in this paper.


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