High density V-GAA transistor structure array based on self-aligned double patterning
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2009 ◽
Vol 27
(6)
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pp. 2742
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2015 ◽
Vol 36
(12)
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pp. 1325-1328
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2000 ◽
Vol 13
(2)
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pp. 167-172
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1988 ◽
Vol 46
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pp. 902-903
1995 ◽
Vol 53
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pp. 512-513
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1987 ◽
Vol 45
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pp. 392-393
1990 ◽
Vol 19
(2)
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pp. 299-309
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