On-Chip Touch Sensor Readout Circuit Using Passive Sigma-Delta Modulator Capacitance-to-Digital Converter

2015 ◽  
Vol 15 (7) ◽  
pp. 3893-3902 ◽  
Author(s):  
Bo Liu ◽  
Zaniar Hoseini ◽  
Kye-Shin Lee ◽  
Yong-Min Lee
2011 ◽  
Vol 46 (9) ◽  
pp. 2084-2098 ◽  
Author(s):  
Mohamed M. Elsayed ◽  
Vijay Dhanasekaran ◽  
Manisha Gambhir ◽  
Jose Silva-Martinez ◽  
Edgar Sanchez-Sinencio

2011 ◽  
Vol 483 ◽  
pp. 38-42 ◽  
Author(s):  
Le Guan ◽  
Jia Li Gao ◽  
Jin Kui Chu

The methods of on-chip integrated testing have a wide application with the development of the study for MEMS materials properties measurement in microscale. A novel on-chip integrated micro-tensile testing system is designed through system-level simulation based on macromodels to measure the fracture strength and fatigue mechanical properties of polysilicon thin films. The structure of testing instrument consists of V-beam electrothermal actuator, differential capacitance sensor, supporting spring and specimen. The capacitance signal is sensed and controlled by a second sigma-delta modulator circuit. The analytic macromodel of polysilicon thin film specimen considering geometric nonlinearity and the numerical reduced-order model of V-beam electrothermal actuator based on Krylov subspace projection are created separately and described in the MAST hardware language. The mechanical structure dimension size and circuit components parameters are determined and optimized according to system-level simulation. The computing result has shown that the self-build macromodels and the on-chip integrated test system are efficient and reliable.


Author(s):  
Deepak Prasad ◽  
Vijay Nath

In the current paper, an accurate with low power consumed sigma delta (ΣΔ) analog to digital converter has been designed for the aerospace applications. The sigma delta ADC has been designed in such a way that it works fine with consumption of low power and high accuracy in the system on chip (SoC) temperature sensor where the analog output from the temperature sensor unit will be the fed to the analog to digital converter. To check the robustness, different parameters with variation has been analyzed. The high gain operational amplifier plays a vital role in the circuits design. Hence, a 30 MHz operational amplifier has also been proposed whose unity gain bandwidth (UGB) has been observed of about 30 MHz, 51.1dB dc gain and slew rate (SR) of about 27.9 V/ μsec. For the proper operation of the circuit, a power supply of +1.3V to -1.3V is used. The proposed sigma delta ADC modulator is showing better results over previously designed modulator in terms of power consumption, error and performance. The design and simulation have been tested with the help of cadence analog design environment with UMC 90nm CMOS process technology.


Micromachines ◽  
2019 ◽  
Vol 10 (9) ◽  
pp. 561
Author(s):  
Rongshan Wei ◽  
Weiwen Lin ◽  
Xiaoxia Xiao ◽  
Qunchao Chen ◽  
Fanyang Li

This study aims to propose a capacitance-to-digital converter (CDC) based on a third-order cascade of integrators with a feed-forward (CIFF) incremental sigma-delta modulator for smart humidity sensor application. Disguised zoom-in technology was proposed to enlarge the measurable range of the CDC. The input range of the CDC was 0–388 pF. The proposed CDC was realized using 0.18 μm complementary metal-oxide-semiconductor technology. Results show that the CDC performs a 13-bit capacitance-to-digital conversion in 0.8 ms. The analog system consumes 169.7 μA from a 1.8 V supply, which corresponds to a figure of merit (FOM) of 3.0 nJ/step. The proposed CDC was combined with a HS1101 humidity sensor to demonstrate its incorporation in an overall system design. The resolution was 0.7% relative humidity (RH) over a range of 30%–90% RH.


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