A New Direct Measurement Method of Time Dependent Dielectric Breakdown at High Frequency

2020 ◽  
Vol 41 (10) ◽  
pp. 1460-1463
Author(s):  
Melissa Arabi ◽  
Xavier Garros ◽  
Jacques Cluzel ◽  
Mustapha Rafik ◽  
Xavier Federspiel ◽  
...  
2003 ◽  
Vol 766 ◽  
Author(s):  
Ahila Krishnamoorthy ◽  
N.Y. Huang ◽  
Shu-Yunn Chong

AbstractBlack DiamondTM. (BD) is one of the primary candidates for use in copper-low k integration. Although BD is SiO2 based, it is vastly different from oxide in terms of dielectric strength and reliability. One of the main reliability concerns is the drift of copper ions under electric field to the surrounding dielectric layer and this is evaluated by voltage ramp (V-ramp) and time dependent dielectric breakdown (TDDB). Metal 1 and Metal 2 intralevel comb structures with different metal widths and spaces were chosen for dielectric breakdown studies. Breakdown field of individual test structures were obtained from V-ramp tests in the temperature range of 30 to 150°C. TDDB was performed in the field range 0.5 – 2 MV/cm. From the leakage between combs at the same level (either metal 1 or metal 2) Cu drift through SiC/BD or SiN/BD interface was characterized. It was found that Cu/barrier and barrier/low k interfaces functioned as easy paths for copper drift thereby shorting the lines. Cu/SiC was found to provide a better interface than Cu/SiN.


2021 ◽  
Vol 68 (5) ◽  
pp. 2220-2225
Author(s):  
Stefano Dalcanale ◽  
Michael J. Uren ◽  
Josephine Chang ◽  
Ken Nagamatsu ◽  
Justin A. Parke ◽  
...  

2007 ◽  
Vol 46 (No. 28) ◽  
pp. L691-L692 ◽  
Author(s):  
Takashi Miyakawa ◽  
Tsutomu Ichiki ◽  
Junichi Mitsuhashi ◽  
Kazutoshi Miyamoto ◽  
Tetsuo Tada ◽  
...  

Author(s):  
Federico Giuliano ◽  
Susanna Reggiani ◽  
Elena Gnani ◽  
Antonio Gnudi ◽  
Mattia Rossetti ◽  
...  

2013 ◽  
Vol 26 (3) ◽  
pp. 281-296
Author(s):  
E. Atanassova ◽  
A. Paskaleva

The effect of both the process-induced defects and the dopant on the time-dependent-dielectric breakdown in Ta2O5 stacks is discussed. The breakdown degradation is analyzed in terms of specific properties of high-k stacks which make their dielectric breakdown mechanism completely different from that of classical SiO2. The relative impact of a number of factors constituting the reliability issues in Ta2O5-based capacitors (trapping in pre-existing traps, stress-induced new traps generation, the presence of interface layer at Si and the role of the dopant) is clarified.


Sensors ◽  
2021 ◽  
Vol 21 (22) ◽  
pp. 7698
Author(s):  
Xiaorong Gong ◽  
Shudong Chen ◽  
Shuang Zhang

The Overhauser magnetometer is a scalar quantum magnetometer based on the dynamic nuclear polarization (DNP) effect in the Earth’s magnetic field. Sensitivity is a key technical specification reflecting the ability of instruments to sense small variations of the Earth’s magnetic field and is closely related to the signal-to-noise ratio (SNR) of the free induction decay (FID) signal. In this study, deuterated 15N TEMPONE radical is used in our sensor to obtain high DNP enhancement. The measured SNR of the FID signal is approximately 63/1, and the transverse relaxation time T2 is 2.68 s. The direct measurement method with a single instrument and the synchronous measurement method with two instruments are discussed for sensitivity estimation in time and frequency domains under different electromagnetic interference (EMI) environments and different time periods. For the first time, the correlation coefficient of the magnetic field measured by the two instruments is used to judge the degree of the influence of the environmental noise on the sensitivity estimation. The sensitivity evaluation in the field environment is successfully realized without electrical and magnetic shields. The direct measurement method is susceptible to EMI and cannot work in general electromagnetic environments, except it is sufficiently quiet. The synchronous measurement method has an excellent ability to remove most natural and artificial EMIs and can be used under noisy environments. Direct and synchronous experimental results show that the estimated sensitivity of the JOM-4S magnetometer is approximately 0.01 nT in time domain and approximately 0.01 nT/ in frequency domain at a 3 s cycling time. This study provides a low-cost, simple, and effective sensitivity estimation method, which is especially suitable for developers and users to estimate the performance of the instrument.


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