Multi-functional optically sensitive metal-insulator-semiconductor devices based on Pt nanoparticles fabricated in-situ with a dielectric stack using atomic layer deposition

2015 ◽  
Author(s):  
R. Padmanabhan ◽  
V. Mikhelashvili ◽  
B. Meyler ◽  
S. Yofis ◽  
S. Weindling ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Semiconductor Devices ◽  
Pt Nanoparticles ◽  
Atomic Layer ◽  
Metal Insulator ◽  
Metal Insulator Semiconductor ◽  
Layer Deposition

scholarly journals In situ study of the thermal stability of supported Pt nanoparticles and their stabilization via atomic layer deposition overcoating

Nanoscale ◽  
2020 ◽  
Vol 12 (21) ◽  
pp. 11684-11693
Author(s):  
Eduardo Solano ◽  
Jolien Dendooven ◽  
Ji-Yu Feng ◽  
Philipp Brüner ◽  
Matthias M. Minjauw ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Atomic Layer Deposition ◽  
Pt Nanoparticles ◽  
Atomic Layer ◽  
Pt Nanoparticle ◽  
In Situ Study ◽  
Layer Deposition ◽  
Nanoparticle Stabilization ◽  
Thermal Stability Of

Supported Pt nanoparticle stabilization via Atomic Layer Deposition overcoating with Al2O3 has been proved to prevent particle coarsening during thermal annealing for widely spaced nanoparticles while ensuring surface accessibility for applications.

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