Diagnostics of positive and negative ions in high-density CF/sub 4/ plasmas by time-of-flight mass spectrometry
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1997 ◽
Vol 36
(Part 1, No. 3A)
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pp. 1282-1286
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2003 ◽
Vol 42
(Part 1, No. 11)
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pp. 7080-7085
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1985 ◽
Vol 9
(1)
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pp. 103-106
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2018 ◽
Vol 59
(3)
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pp. 126-133
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