Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF4and C4F8Plasmas

1997 ◽  
Vol 36 (Part 1, No. 3A) ◽  
pp. 1282-1286 ◽  
Author(s):  
Koichi Sasaki ◽  
Kenichiro Ura ◽  
Kazunari Suzuki ◽  
Kiyoshi Kadota
2003 ◽  
Vol 42 (Part 1, No. 11) ◽  
pp. 7080-7085 ◽  
Author(s):  
Hiroaki Yamaguchi ◽  
Samad Sobhanian ◽  
Motoshi Goto ◽  
Shigeru Morita ◽  
Kazuo Kawahata ◽  
...  

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