Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF4and C4F8Plasmas
1997 ◽
Vol 36
(Part 1, No. 3A)
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pp. 1282-1286
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2003 ◽
Vol 42
(Part 1, No. 11)
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pp. 7080-7085
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Keyword(s):
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2018 ◽
Vol 59
(3)
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pp. 126-133
Keyword(s):
2013 ◽
Vol 31
(9)
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pp. 838
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2015 ◽
Vol 33
(9)
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pp. 1002
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